Al doped zinc oxide thin films on polymer substrates deposited by inductively coupled plasma assisted reactive sputtering

2012 ◽  
Vol 12 ◽  
pp. S118-S122 ◽  
Author(s):  
Dong-su Jang ◽  
Seung-jae Jung ◽  
Jung-joong Lee
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Inductively Coupled Plasma ◽  
Reactive Sputtering ◽  
Oxide Thin Films ◽  
Polymer Substrates ◽  
Inductively Coupled

Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment

2014 ◽  
Vol 16 (1) ◽  
pp. 79-82 ◽  
Author(s):  
Zebin Li ◽  
Zhonghang Wu ◽  
Jiaqi Ju ◽  
Kongduo He ◽  
Zhenliu Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Plasma Treatment ◽  
Work Function ◽  
Inductively Coupled Plasma ◽  
Oxide Thin Films ◽  
Inductively Coupled

High-Speed Etching of Indium-Tin-Oxide Thin Films Using an Inductively Coupled Plasma

1994 ◽  
Vol 33 (Part 1, No. 7B) ◽  
pp. 4438-4441 ◽  
Author(s):  
Keiji Nakamura ◽  
Tomonori Imura ◽  
Hideo Sugai ◽  
Michiko Ohkubo ◽  
Katsutaro Ichihara
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Inductively Coupled Plasma ◽  
High Speed ◽  
Oxide Thin Films ◽  
Inductively Coupled
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