Growth of very large grains in polycrystalline silicon thin films by the sequential combination of vapor induced crystallization using AlCl3 and pulsed rapid thermal annealing

Kyung Min Ahn; Seung Mo Kang; Byung Tae Ahn

doi:10.1016/j.cap.2012.04.010

Growth of very large grains in polycrystalline silicon thin films by the sequential combination of vapor induced crystallization using AlCl3 and pulsed rapid thermal annealing

Current Applied Physics ◽

10.1016/j.cap.2012.04.010 ◽

2012 ◽

Vol 12 (6) ◽

pp. 1454-1458 ◽

Cited By ~ 5

Author(s):

Kyung Min Ahn ◽

Seung Mo Kang ◽

Byung Tae Ahn

Keyword(s):

Thin Films ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Sequential Combination ◽

Induced Crystallization

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Low-Resistivity Phosphorus-Doped Polycrystalline Silicon Thin Films Formed by Catalytic Chemical Vapor Deposition and Successive Rapid Thermal Annealing

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.501 ◽

2002 ◽

Vol 41 (Part 1, No. 2A) ◽

pp. 501-506 ◽

Cited By ~ 13

Author(s):

Rui Morimoto ◽

Akira Izumi ◽

Atsushi Masuda ◽

Hideki Matsumura

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Vapor Deposition ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Catalytic Chemical Vapor Deposition ◽

Silicon Thin Films ◽

Phosphorus Doped

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Polycrystalline silicon thin films by aluminum induced crystallization of amorphous silicon

Applied Surface Science ◽

10.1016/j.apsusc.2012.09.019 ◽

2013 ◽

Vol 264 ◽

pp. 11-16 ◽

Cited By ~ 19

Author(s):

T. Wang ◽

H. Yan ◽

M. Zhang ◽

X. Song ◽

Q. Pan ◽

...

Keyword(s):

Thin Films ◽

Amorphous Silicon ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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Polycrystalline silicon thin films on glass by aluminum-induced crystallization

IEEE Transactions on Electron Devices ◽

10.1109/16.791997 ◽

1999 ◽

Vol 46 (10) ◽

pp. 2062-2068 ◽

Cited By ~ 74

Author(s):

O. Nast ◽

S. Brehme ◽

D.H. Neuhaus ◽

S.R. Wenham

Keyword(s):

Thin Films ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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Al-Induced Crystallization of Polycrystalline Silicon Thin Films Based on Solution Method

Acta Physico-Chimica Sinica ◽

10.3866/pku.whxb20080928 ◽

2008 ◽

Vol 24 (09) ◽

pp. 1689-1693

Author(s):

WANG Shuo ◽

◽

LUO Chong ◽

ZHAO Ying ◽

...

Keyword(s):

Thin Films ◽

Polycrystalline Silicon ◽

Solution Method ◽

Silicon Thin Films ◽

Induced Crystallization

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Solid-Phase Amorphization in Layered Metal/Silicon thin Films

MRS Proceedings ◽

10.1557/proc-103-223 ◽

1987 ◽

Vol 103 ◽

Cited By ~ 3

Author(s):

Menachem Nathan

Keyword(s):

Thin Films ◽

Free Energy ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Glassy Phase ◽

Solid Phase ◽

General Scheme ◽

Crystalline Compound ◽

Nucleation Kinetics ◽

Silicon Thin Films

ABSTRACTA general scheme for determining which metal-Si systems undergo solidphase amorphization (SPA) upon rapid thermal annealing is presented and used to investigate Ni-Si, Ti-Si, V-Si, Co-Si and Cr-Si reactions. SPA occurs only in the first three systems. With the glaring exception of Co-Si, the results agree with the thermodynamic predictions of SPA in systems in which the free energy of a glassy phase is significantly lower than the free energy of the separate components. The amorphization may also be influenced by the diffusing species and contamination. Following SPA, the first crystalline compound is determined by nucleation kinetics.

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Electrochemically Deposited Pd-Induced Crystallization of Parallel Needlelike Polycrystalline Silicon from Prepatterned Amorphous Silicon Thin Films

Electrochemical and Solid-State Letters ◽

10.1149/1.1435562 ◽

2002 ◽

Vol 5 (2) ◽

pp. C31

Author(s):

C. W. Chao ◽

G. R. Hu ◽

Y. S. Wu ◽

Y. C. Chen ◽

M. S. Feng

Keyword(s):

Thin Films ◽

Amorphous Silicon ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Electrochemically Deposited ◽

Induced Crystallization

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In situObservation of Polycrystalline Silicon Thin Films Grown Using Aluminum-Doped Zinc Oxide on Glass Substrate by the Aluminum-Induced Crystallization

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.04dp02 ◽

2011 ◽

Vol 50 (4S) ◽

pp. 04DP02 ◽

Cited By ~ 5

Author(s):

Mina Jung ◽

Atsushi Okada ◽

Takanobu Saito ◽

Takashi Suemasu ◽

Chan-Yeup Chung ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Glass Substrate ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Aluminum Doped Zinc Oxide ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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Structural, optical and electrical properties of quasi-monocrystalline silicon thin films obtained by rapid thermal annealing of porous silicon layers

Thin Solid Films ◽

10.1016/j.tsf.2005.12.044 ◽

2006 ◽

Vol 511-512 ◽

pp. 235-237 ◽

Cited By ~ 11

Author(s):

M. Hajji ◽

M. Khardani ◽

N. Khedher ◽

H. Rahmouni ◽

B. Bessaïs ◽

...

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Porous Silicon ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Monocrystalline Silicon ◽

Optical And Electrical Properties ◽

Silicon Thin Films

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Polycrystalline silicon thin films prepared by Ni silicide induced crystallization and the dopant effects on the crystallization

Current Applied Physics ◽

10.1016/j.cap.2012.04.014 ◽

2012 ◽

Vol 12 (6) ◽

pp. 1470-1475 ◽

Cited By ~ 6

Author(s):

Shanglong Peng ◽

Na Feng ◽

Duokai Hu ◽

Deyan He ◽

Chang-Woo Byun ◽

...

Keyword(s):

Thin Films ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Induced Crystallization

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On the Controlling Mechanism of Preferential Orientation of Polycrystalline-Silicon Thin Films Grown by Aluminum-Induced Crystallization

Applied Physics Express ◽

10.1143/apex.3.095803 ◽

2010 ◽

Vol 3 (9) ◽

pp. 095803 ◽

Cited By ~ 25

Author(s):

Mina Jung ◽

Atsushi Okada ◽

Takanobu Saito ◽

Takashi Suemasu ◽

Noritaka Usami

Keyword(s):

Thin Films ◽

Polycrystalline Silicon ◽

Preferential Orientation ◽

Silicon Thin Films ◽

Controlling Mechanism ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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