Optimisation of cold cathode ion source model

2003 ◽  
Vol 3 (6) ◽  
pp. 485-489 ◽  
Author(s):  
G.E Bugrov ◽  
S.K Kondranin ◽  
E.A Kralkina ◽  
V.B Pavlov ◽  
D.V Savinov ◽  
...  
Keyword(s):  
Source Model ◽  
Ion Source ◽  
Cold Cathode ◽  
Cold Cathode Ion Source

A Quick Change Axial Cold Cathode Ion Source

1977 ◽  
Vol 24 (3) ◽  
pp. 1593-1593
Author(s):  
M. L. Mallory ◽  
P. S. Miller ◽  
W. S. Chien
Keyword(s):  
Ion Source ◽  
Cold Cathode ◽  
Cold Cathode Ion Source

The Synthesis of Metal Oxide Films from Compound Powder Targets

1991 ◽  
Vol 236 ◽  
Author(s):  
A.I. Stognij ◽  
V.V. Tokarev ◽  
Yu.N. Mitin
Keyword(s):  
Metal Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Source ◽  
Cold Cathode ◽  
Metal Oxide Films ◽  
Oxygen Ion ◽  
Microscopy Investigation ◽  
Electron Microscopy Investigation ◽  
Cold Cathode Ion Source

AbstractThe paper presents the results of AES, SIMS, RBS and electron microscopy investigation of compound metal oxide films. The films were deposited by sputtering compound targets with oxygen ion beam, extracted from hollow cold cathode ion source.

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