Influence of oxygen precursors on atomic layer deposition of HfO2 and hafnium-titanium oxide films: Comparison of O3- and H2O-based processes

2020 ◽  
Vol 530 ◽  
pp. 147229
Author(s):  
Lauri Aarik ◽  
Tõnis Arroval ◽  
Hugo Mändar ◽  
Raul Rammula ◽  
Jaan Aarik
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Titanium Oxide Films

scholarly journals Atomic layer deposition of titanium oxide films on As-synthesized magnetic Ni particles: Magnetic and safety properties

2017 ◽  
Vol 429 ◽  
pp. 299-304 ◽  
Author(s):  
Peep Uudeküll ◽  
Jekaterina Kozlova ◽  
Hugo Mändar ◽  
Joosep Link ◽  
Mariliis Sihtmäe ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Safety Properties ◽  
Layer Deposition ◽  
Titanium Oxide Films

Effect of substrate-enhanced and inhibited growth on atomic layer deposition and properties of aluminum–titanium oxide films

2016 ◽  
Vol 600 ◽  
pp. 119-125 ◽  
Author(s):  
Tõnis Arroval ◽  
Lauri Aarik ◽  
Raul Rammula ◽  
Vegard Kruusla ◽  
Jaan Aarik
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Titanium Oxide Films

Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates

2008 ◽  
Vol 516 (15) ◽  
pp. 4855-4862 ◽  
Author(s):  
Indrek Jõgi ◽  
Martti Pärs ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Matti Laan ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Silicon Substrates ◽  
Layer Deposition ◽  
Titanium Oxide Films

Retention of Surface Structure Causes Lower Density in Atomic Layer Deposition of Amorphous Titanium Oxide Thin Films

2021 ◽  
Author(s):  
Benjamin Rich ◽  
Yael Etinger-Geller ◽  
G. Ciatto ◽  
A Katsman ◽  
Boaz Pokroy
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Structure ◽  
Titanium Oxide ◽  
Size Effects ◽  
Atomic Layer ◽  
Tio2 Films ◽  
Structural Modifications ◽  
Layer Deposition ◽  
Amorphous Tio2

Size effects and structural modifications in amorphous TiO2 films deposited by atomic layer deposition (ALD) were investigated. As with the previously investigated ALD-deposited Al2O3 system we found that the film’s...

Effects of Chlorine in Titanium Oxide on Palladium Atomic Layer Deposition

2014 ◽  
Vol 118 (39) ◽  
pp. 22611-22619 ◽  
Author(s):  
Yu Lei ◽  
Bin Liu ◽  
Junling Lu ◽  
Joseph A. Libera ◽  
Jeffrey P. Greeley ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Properties of hafnium oxide films grown by atomic layer deposition from hafnium tetraiodide and oxygen

2002 ◽  
Vol 92 (10) ◽  
pp. 5698-5703 ◽  
Author(s):  
Kaupo Kukli ◽  
Mikko Ritala ◽  
Jonas Sundqvist ◽  
Jaan Aarik ◽  
Jun Lu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition
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