Characterization of fused silica surface topography in capacitively coupled atmospheric pressure plasma processing

2019 ◽  
Vol 489 ◽  
pp. 648-657 ◽  
Author(s):  
Duo Li ◽  
Na Li ◽  
Xing Su ◽  
Kan Liu ◽  
Peng Ji ◽  
...  
Keyword(s):  
Surface Topography ◽  
Atmospheric Pressure ◽  
Silica Surface ◽  
Plasma Processing ◽  
Atmospheric Pressure Plasma ◽  
Fused Silica ◽  
Capacitively Coupled ◽  
Pressure Plasma

Study of Form Control Algorithm in Atmospheric Pressure Plasma Processing

2014 ◽  
Vol 620 ◽  
pp. 49-54
Author(s):  
Duo Li ◽  
Bo Wang ◽  
Jun Wang ◽  
Qiang Xin
Keyword(s):  
Atmospheric Pressure ◽  
Dwell Time ◽  
Control Algorithm ◽  
Removal Rate ◽  
Ion Beam ◽  
Plasma Processing ◽  
Atmospheric Pressure Plasma ◽  
Fused Silica ◽  
Time Function ◽  
Pressure Plasma

Atmospheric Pressure Plasma Processing (APPP) has demonstrated that it can achieve high removal rate and induce no sub-surface damage on the silica based material of optical surface. Compared with traditional mechanical polishing and ion beam figuring, APPP technology is cost effective and very promising in the optics fabrication field. In principle, Atmospheric Pressure Plasma Processing can be described by the two-dimensional convolution equation with dwell time function and plasma removal function. Thus, dwell time function can be solved theoretically by the process of de-convolution, which is the essence of form control algorithm. First, this paper compares and analyzes common de-convolution algorithms by the simulated processing. From the simulation results, the algorithm based on the principle of image restoration has good solving speed, high calculation accuracy. Therefore, we choose it as the form control algorithm for Atmospheric Pressure Plasma Processing. However, the high temperature of plasma plume results in the non-linear relationship between the removal depth and time, further affecting the stability of the algorithm. Then, using the actual experiment data, we build the nonlinear relationship function model to compensate the heat effect in the algorithm. Finally, the modified algorithm is verified by the 7um uniform removal on the fused silica using Atmospheric Pressure Plasma Processing.

Study on Atmospheric Pressure Plasma Processing of Fused Silica

2013 ◽  
Vol 706-708 ◽  
pp. 270-273
Author(s):  
Dong Fang Wang
Keyword(s):  
Atmospheric Pressure ◽  
Material Removal ◽  
Plasma Processing ◽  
Atmospheric Pressure Plasma ◽  
Input Power ◽  
Fused Silica ◽  
Subsurface Damage ◽  
Key Factors ◽  
Workpiece Surface ◽  
Pressure Plasma

In order to get ultra-smooth surface without subsurface damage efficiently for fused silica, the atmospheric pressure plasma processing (APPP) is developed. It is based on chemical reaction between active radicals excited by plasma and workpiece surface atoms, so the subsurface damage caused by contact stress can be avoided and atomic-level precision machining can be achieved. In this paper, the influence on material removal function by the key factors of APPP including the flow rate of reaction gases, input power, and processing distance are discussed. In addition, by the regression model a quantitative mathematical model of the material removal function of the atmospheric pressure plasma processing on fused silica is established. And this model is verified by experimental data.

Form control in atmospheric pressure plasma processing of ground fused silica

2014 ◽  
Author(s):  
Duo Li ◽  
Bo Wang ◽  
Qiang Xin ◽  
Huiliang Jin ◽  
Jun Wang ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Plasma Processing ◽  
Atmospheric Pressure Plasma ◽  
Fused Silica ◽  
Pressure Plasma

scholarly journals High-Accuracy Surface Topography Manufacturing for Continuous Phase Plates Using an Atmospheric Pressure Plasma Jet

Micromachines ◽  
2021 ◽  
Vol 12 (6) ◽  
pp. 683
Author(s):  
Huiliang Jin ◽  
Caixue Tang ◽  
Haibo Li ◽  
Yuanhang Zhang ◽  
Yaguo Li
Keyword(s):  
Surface Topography ◽  
Atmospheric Pressure ◽  
High Efficiency ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Continuous Phase ◽  
High Accuracy ◽  
Phase Plate ◽  
Atmospheric Pressure Plasma Jet ◽  
Pressure Plasma

The continuous phase plate (CPP) is the vital diffractive optical element involved in laser beam shaping and smoothing in high-power laser systems. The high gradients, small spatial periods, and complex features make it difficult to achieve high accuracy when manufacturing such systems. A high-accuracy and high-efficiency surface topography manufacturing method for CPP is presented in this paper. The atmospheric pressure plasma jet (APPJ) system is presented and the removal characteristics are studied to obtain the optimal processing parameters. An optimized iterative algorithm based on the dwell point matrix and a fast Fourier transform (FFT) is proposed to improve the accuracy and efficiency in the dwell time calculation process. A 120 mm × 120 mm CPP surface topography with a 1326.2 nm peak-to-valley (PV) value is fabricated with four iteration steps after approximately 1.6 h of plasma processing. The residual figure error between the prescribed surface topography and plasma-processed surface topography is 28.08 nm root mean square (RMS). The far-field distribution characteristic of the plasma-fabricated surface is analyzed, for which the energy radius deviation is 11 μm at 90% encircled energy. The experimental results demonstrates the potential of the APPJ approach for the manufacturing of complex surface topographies.

Characterization of pulsed atmospheric-pressure plasma streams (PAPS) generated by a plasma gun

2012 ◽  
Vol 21 (3) ◽  
pp. 034017 ◽  
Author(s):  
E Robert ◽  
V Sarron ◽  
D Riès ◽  
S Dozias ◽  
M Vandamme ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Gun ◽  
Pressure Plasma
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