A pressure tuned stop-flow atomic layer deposition process for MoS2 on high porous nanostructure and fabrication of TiO2/MoS2 core/shell inverse opal structure

2017 ◽  
Vol 422 ◽  
pp. 536-543 ◽  
Author(s):  
Xianglin Li ◽  
Manjunath Puttaswamy ◽  
Zhiwei Wang ◽  
Chiew Kei Tan ◽  
Andrew C. Grimsdale ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
Core Shell ◽  
Inverse Opal ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition ◽  
Inverse Opal Structure ◽  
Porous Nanostructure ◽  
Stop Flow

scholarly journals In Situ SiO2 Passivation of Epitaxial (100) and (110)InGaAs by Exploiting TaSiOx Atomic Layer Deposition Process

ACS Omega ◽  
2018 ◽  
Vol 3 (11) ◽  
pp. 14567-14574 ◽  
Author(s):  
Mantu K. Hudait ◽  
Michael B. Clavel ◽  
Jheng-Sin Liu ◽  
Shuvodip Bhattacharya
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

Al 2 O 3 Thin Films Prepared by a Combined Thermal‐Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

2019 ◽  
Vol 217 (8) ◽  
pp. 1900237
Author(s):  
Zhen Zhu ◽  
Saoussen Merdes ◽  
Oili M. E. Ylivaara ◽  
Kenichiro Mizohata ◽  
Mikko J. Heikkilä ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thermal Plasma ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

Optical in situ monitoring of plasma-enhanced atomic layer deposition process

2018 ◽  
Vol 57 (6S2) ◽  
pp. 06JF05 ◽  
Author(s):  
Muhammad Zeeshan Arshad ◽  
Kyung Jae Jo ◽  
Hyun Gi Kim ◽  
Sang Jeen Hong
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
In Situ Monitoring ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

Fabrication of 3D Core–Shell Multiwalled Carbon Nanotube@RuO2 Lithium-Ion Battery Electrodes through a RuO2 Atomic Layer Deposition Process

ACS Nano ◽  
2014 ◽  
Vol 9 (1) ◽  
pp. 464-473 ◽  
Author(s):  
Keith E. Gregorczyk ◽  
Alexander C. Kozen ◽  
Xinyi Chen ◽  
Marshall A. Schroeder ◽  
Malachi Noked ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Atomic Layer Deposition ◽  
Lithium Ion Battery ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Deposition Process ◽  
Multiwalled Carbon Nanotube ◽  
Core Shell ◽  
Multiwalled Carbon ◽  
Layer Deposition
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