Influence of laser pulse frequency on the microstructure of aluminum nitride thin films synthesized by pulsed laser deposition

2017 ◽  
Vol 394 ◽  
pp. 197-204 ◽  
Author(s):  
K. Antonova ◽  
L. Duta ◽  
A. Szekeres ◽  
G.E. Stan ◽  
I.N. Mihailescu ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Pulse ◽  
Aluminum Nitride ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Pulse Frequency ◽  
Laser Deposition

Aluminum nitride thin films prepared by radical-assisted pulsed laser deposition

Vacuum ◽  
2000 ◽  
Vol 59 (2-3) ◽  
pp. 649-656 ◽  
Author(s):  
M Ishihara ◽  
K Yamamoto ◽  
F Kokai ◽  
Y Koga
Keyword(s):  
Thin Films ◽  
Aluminum Nitride ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition

Influence of the Growth Atmosphere on the Properties of AIN Grown by Plasma - Assisted Pulsed Laser Deposition

1996 ◽  
Vol 423 ◽  
Author(s):  
T. Ogawa ◽  
M. Okamoto ◽  
Y. Mori ◽  
T. Sasaki
Keyword(s):  
Thin Films ◽  
Aluminum Nitride ◽  
Pulsed Laser Deposition ◽  
Rutherford Backscattering Spectrometry ◽  
Pulsed Laser ◽  
Nitrogen Plasma ◽  
Laser Deposition ◽  
Nitrogen Gas ◽  
Growth Atmosphere ◽  
Cathodoluminescence Study

AbstractWe have grown highly oriented aluminum nitride (AIN) thin films on Si (100) substrates by using pulsed laser deposition from sintering AIN targets. Three different growth environments, vacuum, nitrogen gas, and nitrogen plasma, have been used in order to investigate the effect of the ambient on the film quality. Rutherford backscattering spectrometry suggests that the N/Al ratio increases when the AIN film is grown in a nitrogen-contained ambient. Cathodoluminescence study implies the decrease of oxygen content in the film grown in a nitrogen plasma ambient.

Epitaxial aluminum nitride thin films grown by pulsed laser deposition in various nitrogen ambients

2000 ◽  
Vol 9 (3-6) ◽  
pp. 516-519 ◽  
Author(s):  
M Okamoto ◽  
M Yamaoka ◽  
Y.K Yap ◽  
M Yoshimura ◽  
Y Mori ◽  
...  
Keyword(s):  
Thin Films ◽  
Aluminum Nitride ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition
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