Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler
2016 ◽
Vol 387
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pp. 732-735
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Keyword(s):
2017 ◽
Vol 197
(3)
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pp. 312-321
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2011 ◽
Vol 318
(1)
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pp. 488-491
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2013 ◽
Vol 46
(17)
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pp. 175002
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Keyword(s):
2008 ◽
Vol 38
(2)
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pp. 205-225
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