Preparation of γ-Al2O3 films by laser chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2015.02.196 ◽

2015 ◽

Vol 340 ◽

pp. 160-165 ◽

Cited By ~ 8

Author(s):

Ming Gao ◽

Akihiko Ito ◽

Takashi Goto

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition ◽

Al2o3 Films

Download Full-text

Low-temperature deposition of α-Al2O3 films by laser chemical vapor deposition using a diode laser

Applied Surface Science ◽

10.1016/j.apsusc.2010.01.048 ◽

2010 ◽

Vol 256 (12) ◽

pp. 3906-3911 ◽

Cited By ~ 24

Author(s):

Yu You ◽

Akihiko Ito ◽

Rong Tu ◽

Takashi Goto

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Diode Laser ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Α Al2o3 ◽

Al2o3 Films

Download Full-text

Moderate temperature and high-speed synthesis of α-Al2O3 films by laser chemical vapor deposition using Nd:YAG laser

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2009.12.029 ◽

2010 ◽

Vol 204 (14) ◽

pp. 2302-2306 ◽

Cited By ~ 22

Author(s):

Hokuto Kadokura ◽

Akihiko Ito ◽

Teiichi Kimura ◽

Takashi Goto

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Nd:Yag Laser ◽

High Speed ◽

Chemical Vapor ◽

Moderate Temperature ◽

Laser Chemical Vapor Deposition ◽

Α Al2o3 ◽

Al2o3 Films

Download Full-text

Deposition of α-Al2O3 films on Ti(C, N)-based cermet substrate by laser chemical vapor deposition using a diode laser

Journal of the Ceramic Society of Japan ◽

10.2109/jcersj2.119.570 ◽

2011 ◽

Vol 119 (1391) ◽

pp. 570-572 ◽

Cited By ~ 1

Author(s):

Yu YOU ◽

Akihiko ITO ◽

Rong TU ◽

Takashi GOTO

Keyword(s):

Chemical Vapor Deposition ◽

Diode Laser ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition ◽

Α Al2o3 ◽

Al2o3 Films

Download Full-text

Highly (001)-oriented α-Al2O3 films prepared by laser chemical vapor deposition

Materials Letters ◽

10.1016/j.matlet.2013.04.113 ◽

2013 ◽

Vol 106 ◽

pp. 11-13 ◽

Cited By ~ 13

Author(s):

Yu You ◽

Akihiko Ito ◽

Takashi Goto

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition ◽

Α Al2o3 ◽

Al2o3 Films

Download Full-text

(006)-oriented α-Al2O3 films prepared in CO2–H2 atmosphere by laser chemical vapor deposition using a diode laser

Materials Science and Engineering B ◽

10.1016/j.mseb.2011.05.030 ◽

2011 ◽

Vol 176 (13) ◽

pp. 984-989 ◽

Cited By ~ 3

Author(s):

Yu You ◽

Akihiko Ito ◽

Rong Tu ◽

Takashi Goto

Keyword(s):

Chemical Vapor Deposition ◽

Diode Laser ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition ◽

Α Al2o3 ◽

Al2o3 Films

Download Full-text

Texture and orientation characteristics of α-Al2O3 films prepared by laser chemical vapor deposition using Nd:YAG laser

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2009.09.088 ◽

2010 ◽

Vol 489 (2) ◽

pp. 469-474 ◽

Cited By ~ 55

Author(s):

Akihiko Ito ◽

Hokuto Kadokura ◽

Teiichi Kimura ◽

Takashi Goto

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Nd:Yag Laser ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition ◽

Α Al2o3 ◽

Al2o3 Films

Download Full-text

Orientation control of α-Al2O3 films prepared by laser chemical vapor deposition using a diode laser

Journal of the Ceramic Society of Japan ◽

10.2109/jcersj2.118.366 ◽

2010 ◽

Vol 118 (1377) ◽

pp. 366-369 ◽

Cited By ~ 9

Author(s):

Yu YOU ◽

Akihiko ITO ◽

Rong TU ◽

Takashi GOTO

Keyword(s):

Chemical Vapor Deposition ◽

Diode Laser ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition ◽

Orientation Control ◽

Α Al2o3 ◽

Al2o3 Films

Download Full-text

Influence of oxygen partial pressure on SmBa2Cu3O7-δ film deposited by laser chemical vapor deposition

Journal of Asian Ceramic Societies ◽

10.1080/21870764.2020.1860434 ◽

2020 ◽

pp. 1-11

Author(s):

Ting Wang ◽

Rong Tu ◽

Canlin Zhang ◽

Song Zhang ◽

Kaidong Wang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition

Download Full-text

Laser Chemical Vapor Deposition

Physical Processes in Laser-Materials Interactions ◽

10.1007/978-1-4684-4322-6_22 ◽

1983 ◽

pp. 455-468 ◽

Cited By ~ 2

Author(s):

Susan D. Allen

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition

Download Full-text

ArF excimer laser chemical vapor deposition a-Si:H/a-AlxO1−x superlattices

Thin Solid Films ◽

10.1016/0040-6090(92)90904-p ◽

1992 ◽

Vol 218 (1-2) ◽

pp. 62-67

Author(s):

K. Uwasawa ◽

F. Ishihara ◽

S. Matsumoto

Keyword(s):

Chemical Vapor Deposition ◽

Excimer Laser ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition ◽

Arf Excimer Laser

Download Full-text