Crednerite-CuMnO2 thin films prepared using atmospheric pressure plasma annealing

2015 ◽  
Vol 338 ◽  
pp. 113-119 ◽  
Author(s):  
Hong-Ying Chen ◽  
Yu-Chang Lin ◽  
Jiann-Shing Lee
Keyword(s):  
Thin Films ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Pressure Plasma ◽  
Plasma Annealing

scholarly journals The Effects of Thermal and Atmospheric Pressure Radio Frequency Plasma Annealing in the Crystallization of TiO2 Thin Films

Coatings ◽  
2019 ◽  
Vol 9 (6) ◽  
pp. 357 ◽  
Author(s):  
Yu Xu ◽  
Yu Zhang ◽  
Tao He ◽  
Ke Ding ◽  
Xiaojiang Huang ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Treatment ◽  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Emission Spectra ◽  
Tio2 Thin Films ◽  
Pressure Plasma ◽  
Amorphous Tio2 ◽  
Plasma Annealing

Amorphous TiO2 thin films were respectively annealed by 13.56 MHz radio frequency (RF) atmospheric pressure plasma at discharge powers of 40, 60, 80 W and thermal treatment at its corresponding substrate temperature (Ts). Ts was estimated through three measurement methods (thermocouple, Newton’s law of cooling and OH optical emission spectra simulation) and showed identically close results of 196, 264 and 322 °C, respectively. Comparing with thermal annealing, this RF atmospheric pressure plasma annealing process has obvious effects in improving crystallization of the amorphous films, based on the XRD and Raman analysis of the film. Amorphous TiO2 film can be changed to anatase film at about 264 °C of Ts for 30 min plasma treatment, while it almost remains amorphous after 322 °C thermal treatment for the same time.

Trajectory effect on the properties of large area ZnO thin films deposited by atmospheric pressure plasma jet

2014 ◽  
Vol 314 ◽  
pp. 1074-1081 ◽  
Author(s):  
Jia-Yang Juang ◽  
Tung-Sheng Chou ◽  
Hsin-Tien Lin ◽  
Yuan-Fang Chou ◽  
Chih-Chiang Weng
Keyword(s):  
Thin Films ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Zno Thin Films ◽  
Atmospheric Pressure Plasma Jet ◽  
Large Area ◽  
Pressure Plasma

Deposition of thin films on glass fiber fabrics by atmospheric pressure plasma jet

2020 ◽  
Vol 404 ◽  
pp. 126498
Author(s):  
Ming Gao ◽  
Yu Wang ◽  
Yongliang Zhang ◽  
Ying Li ◽  
Yao Tang ◽  
...  
Keyword(s):  
Thin Films ◽  
Glass Fiber ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Pressure Plasma
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