Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate

2014 ◽  
Vol 297 ◽  
pp. 134-138 ◽  
Author(s):  
L. Hong ◽  
Rusli ◽  
X.C. Wang ◽  
H.Y. Zheng ◽  
H. Wang ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Si Substrate ◽  
Large Area ◽  
Laser Fabrication ◽  
Periodic Surface ◽  
Ripple Structure

Gold-film coating assisted femtosecond laser fabrication of large-area, uniform periodic surface structures

2015 ◽  
Vol 54 (6) ◽  
pp. 1314 ◽  
Author(s):  
Pin Feng ◽  
Lan Jiang ◽  
Xin Li ◽  
Wenlong Rong ◽  
Kaihu Zhang ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Gold Film ◽  
Film Coating ◽  
Surface Structures ◽  
Large Area ◽  
Laser Fabrication ◽  
Periodic Surface

Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser

2021 ◽  
Author(s):  
Yuchan Zhang ◽  
Q.L J ◽  
Kaiqiang Cao ◽  
Tianqi Chen ◽  
Chengke No Last Name ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Surface Structures ◽  
Large Area ◽  
Periodic Surface

scholarly journals Formation of laser-induced periodic surface nanometric concentric ring structures on silicon surfaces through single-spot irradiation with orthogonally polarized femtosecond laser double-pulse sequences

Nanophotonics ◽  
2021 ◽  
Vol 10 (2) ◽  
pp. 1273-1283
Author(s):  
Wei Liu ◽  
Jie Hu ◽  
Lan Jiang ◽  
Ji Huang ◽  
Jiangang Lu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Pulse Sequences ◽  
Double Pulse ◽  
Silicon Surfaces ◽  
Large Area ◽  
Concentric Ring ◽  
Periodic Surface ◽  
Single Spot ◽  
Structural Colors ◽  
Ring Structures

Abstract In this study, we report the formation of laser-induced periodic surface nanometric concentric ring structures on silicon surfaces through single-spot irradiation with orthogonally polarized femtosecond laser double-pulse sequences (OP pulses). The period of the ring structures is marginally smaller than the irradiated laser’s wavelength, which indicates that the structures are a type of low-spatial-frequency laser-induced periodic surface structures. Regular nanometric concentric ring structures can be formed when the time delay between two subpulses is approximately 1 ps (roughly from 500 fs to 1.5 ps) and the number of laser bursts is approximately 4. The formation mechanism of the concentric ring structures is attributed to the surface wave (i.e., cylindrical wave) stimulated by OP pulses through single-spot irradiation is radially distributed. Large area of concentric ring structures eliminating anisotropy in the generation of structural colors was shown in this paper.

Large area uniform femtosecond-laser-induced periodic surface structures fabricated on heated LiNbO3:Fe

2021 ◽  
Author(s):  
Yanan Li ◽  
Tianhao Zhang
Keyword(s):  
Femtosecond Laser ◽  
Laser Scanning ◽  
Scanning Speed ◽  
Surface Structures ◽  
Optimum Process ◽  
Large Area ◽  
Periodic Surface ◽  
Laser Fluences ◽  
Fs Laser ◽  
Scanning Irradiation

Abstract The influence of laser fluences and scanning speeds on the morphologies of laser-induced periodic surface structures(LIPSS) on heated LiNbO3:Fe(1000○C) surfaces was investigated under femtosecond(fs) laser scanning irradiation. Laser fluence of 8.5 kJ/m2 and scanning speed of 1 mm/s were found to be optimum process parameters, and large-area fs-LIPSS on LiNbO3:Fe with an area of 8 mm×8 mm were fabricated with these parameters. The wettability of laser-textured LiNbO3:Fe changed to be hydrophilic, and the absorptance was improved substantially in the spectral range of 400-2000 nm. This technique is efficient, and environmentally friendly, which will attract tremendous interest in nano-photoelectron and nano-mechanics.

PZT Film and Si Substrate Two-Layer System Patterning Morphology by Femtosecond Pulsed Laser

2007 ◽  
Author(s):  
Shizhou Xiao ◽  
Rui Guo ◽  
Guanghua Cheng ◽  
Yalei Wu ◽  
Wenhao Huang ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Energy ◽  
Threshold Model ◽  
Pulsed Laser ◽  
Direct Writing ◽  
Si Substrate ◽  
Layer System ◽  
Substrate Heating ◽  
Pzt Film ◽  
Femtosecond Pulsed Laser

In this paper, a novel PZT film patterning method by femtosecond laser is proposed. The method is different from traditional dry-etching and wet-etching technology. Femtosecond laser microfabrication technology has several advantages such as high resolution, no mask direct-writing and seldom-heating, etc. A two-layer (PZT thin film and substrate) heating and ablating threshold model is built and the relationship of PZT/Si two-layer system micro ablation morphology depending on laser pulse energy is constructed. From the model and experiment data, we obtain the suitable energy region to pattern PZT film freely without damage Si substrate. A 3μm resolution of PZT pattern is achieved in our experiment. In order to verify the fabrication available of this technology, several micro functional devices are successfully patterned by optimized femtosecond pulsed laser energy and their function are detected. The results prove that the PZT patterning quality is good.

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