PZT Film and Si Substrate Two-Layer System Patterning Morphology by Femtosecond Pulsed Laser

Author(s):  
Shizhou Xiao ◽  
Rui Guo ◽  
Guanghua Cheng ◽  
Yalei Wu ◽  
Wenhao Huang ◽  
...  

In this paper, a novel PZT film patterning method by femtosecond laser is proposed. The method is different from traditional dry-etching and wet-etching technology. Femtosecond laser microfabrication technology has several advantages such as high resolution, no mask direct-writing and seldom-heating, etc. A two-layer (PZT thin film and substrate) heating and ablating threshold model is built and the relationship of PZT/Si two-layer system micro ablation morphology depending on laser pulse energy is constructed. From the model and experiment data, we obtain the suitable energy region to pattern PZT film freely without damage Si substrate. A 3μm resolution of PZT pattern is achieved in our experiment. In order to verify the fabrication available of this technology, several micro functional devices are successfully patterned by optimized femtosecond pulsed laser energy and their function are detected. The results prove that the PZT patterning quality is good.

Author(s):  
Tengfei Wu ◽  
Changhe Zhou ◽  
Linwei Zhu ◽  
Jin Xie

Since the generation of the femtosecond laser, the interaction between femtosecond pulsed laser and metal films has been extensively investigated. There are many peculiar merits of the femtosecond pulsed laser, such as precise control of micromachining sizes and minimized thermal damage to the surroundings. As we all know, a surface-relief grating can be widely applied in holographic data storage, optical communication, optical information processing and optoelectronic industry. Because the absorption coefficient of the silica glass is very low and the small nanojoule fluence of femtosecond Ti:sapphire laser oscillator, it’s difficult to micromachine the surface-relief grating on the silica glass by femtosecond Ti:sapphire laser oscillator. However, in this paper we made the surface-relief grating on the silica glass by using the intereference technique of femtosecond laser with the silica glass coated a chromium films. The optical absorption coefficient of the chromium films is much higher than that of the silica glass. So the heat energy absorbed by the chromium films should be the energy source for inducing the surface-relief grating on silica glass. Experimental results shown that this micromachining technology is simple and effective. It is helpful for us to understand the mechanism of the interaction between the femtosecond laser and chromium films.


Author(s):  
V. Pouget ◽  
E. Faraud ◽  
K. Shao ◽  
S. Jonathas ◽  
D. Horain ◽  
...  

Abstract This paper presents the use of pulsed laser stimulation with picosecond and femtosecond laser pulses. We first discuss the resolution improvement that can be expected when using ultrashort laser pulses. Two case studies are then presented to illustrate the possibilities of the pulsed laser photoelectric stimulation in picosecond single-photon and femtosecond two-photon modes.


2006 ◽  
Vol 31 (19) ◽  
pp. 2867 ◽  
Author(s):  
Xiangeng Meng ◽  
Katsuhisa Tanaka ◽  
Shunsuke Murai ◽  
Koji Fujita ◽  
Kiyotaka Miura ◽  
...  

2021 ◽  
Vol 61 ◽  
pp. 102427
Author(s):  
Xiaoyan Sun ◽  
Zikun Chang ◽  
Li Zeng ◽  
Xinran Dong ◽  
Youwang Hu ◽  
...  

2021 ◽  
Vol 18 (1) ◽  
Author(s):  
Dominique Lison ◽  
Saloua Ibouraadaten ◽  
Sybille van den Brule ◽  
Milica Todea ◽  
Adriana Vulpoi ◽  
...  

Abstract Background In vitro models are widely used in nanotoxicology. In these assays, a careful documentation of the fraction of nanomaterials that reaches the cells, i.e. the in vitro delivered dose, is a critical element for the interpretation of the data. The in vitro delivered dose can be measured by quantifying the amount of material in contact with the cells, or can be estimated by applying particokinetic models. For carbon nanotubes (CNTs), the determination of the in vitro delivered dose is not evident because their quantification in biological matrices is difficult, and particokinetic models are not adapted to high aspect ratio materials. Here, we applied a rapid and direct approach, based on femtosecond pulsed laser microscopy (FPLM), to assess the in vitro delivered dose of multi-walled CNTs (MWCNTs). Methods and results We incubated mouse lung fibroblasts (MLg) and differentiated human monocytic cells (THP-1) in 96-well plates for 24 h with a set of different MWCNTs. The cytotoxic response to the MWCNTs was evaluated using the WST-1 assay in both cell lines, and the pro-inflammatory response was determined by measuring the release of IL-1β by THP-1 cells. Contrasting cell responses were observed across the MWCNTs. The sedimentation rate of the different MWCNTs was assessed by monitoring turbidity decay with time in cell culture medium. These turbidity measurements revealed some differences among the MWCNT samples which, however, did not parallel the contrasting cell responses. FPLM measurements in cell culture wells revealed that the in vitro delivered MWCNT dose did not parallel sedimentation data, and suggested that cultured cells contributed to set up the delivered dose. The FPLM data allowed, for each MWCNT sample, an adjustment of the measured cytotoxicity and IL-1β responses to the delivered doses. This adjusted in vitro activity led to another toxicity ranking of the MWCNT samples as compared to the unadjusted activities. In macrophages, this adjusted ranking was consistent with existing knowledge on the impact of surface MWCNT functionalization on cytotoxicity, and might better reflect the intrinsic activity of the MWCNT samples. Conclusion The present study further highlights the need to estimate the in vitro delivered dose in cell culture experiments with nanomaterials. The FPLM measurement of the in vitro delivered dose of MWCNTs can enrich experimental results, and may refine our understanding of their interactions with cells.


2021 ◽  
pp. 2100178
Author(s):  
Wenguang Yang ◽  
Honghui Chu ◽  
Shuxiang Cai ◽  
Wenfeng Liang ◽  
Haibo Yu ◽  
...  

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