Room temperature radio-frequency plasma-enhanced pulsed laser deposition of ZnO thin films

2013 ◽  
Vol 266 ◽  
pp. 194-198 ◽  
Author(s):  
S.-H. Huang ◽  
Y.-C. Chou ◽  
C.-M. Chou ◽  
V.K.S. Hsiao
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Pulsed Laser Deposition ◽  
Room Temperature ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Thin Films ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Room-temperature ferromagnetic ordering in Mn-doped ZnO thin films grown by pulsed laser deposition

2006 ◽  
Vol 35 (4) ◽  
pp. 635-640 ◽  
Author(s):  
W. Y. Shim ◽  
K. A. Jeon ◽  
K. I. Lee ◽  
S. Y. Lee ◽  
M. H. Jung ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Room Temperature ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Thin Films ◽  
Doped Zno ◽  
Ferromagnetic Ordering ◽  
Mn Doped

scholarly journals Rapid Annealing of Black ZnO Thin Films Prepared by Pulsed Laser Deposition

2009 ◽  
Vol 46 (1) ◽  
pp. 44-48
Author(s):  
B. Polyakov ◽  
A. Petruhin ◽  
L. Grigorjeva ◽  
P. Kulis ◽  
I. Tale
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Electric Conductivity ◽  
Room Temperature ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Thin Films ◽  
Post Annealing ◽  
Rapid Annealing ◽  
High Electric Conductivity

Rapid Annealing of Black ZnO Thin Films Prepared by Pulsed Laser DepositionZnO thin films were deposited by pulsed laser deposition (fluence 2.2 J/cm2) in vacuum on different substrates kept at room temperature. This temperature allowed for fast film growing, however the as-prepared films had low transparency. To improve this optical property, keeping up at the same time the high electric conductivity of the films, post-annealing procedures in vacuum and in air were carried out. The influence of these procedures on the optical absorption, photoluminescence and electrical properties has been investigated. It is shown that the annealing in air improves only the transparency of such a film, however its conductivity decreases markedly. In turn, vacuum annealing for 3 min. at 600° C results in better transparency of the films, with their electric conductivity kept high.

Room-temperature cathodoluminescence of n-type ZnO thin films grown by pulsed laser deposition in N2, N2O, and O2 background gas

2005 ◽  
Vol 486 (1-2) ◽  
pp. 205-209 ◽  
Author(s):  
M. Lorenz ◽  
H. Hochmuth ◽  
J. Lenzner ◽  
T. Nobis ◽  
G. Zimmermann ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Room Temperature ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Thin Films ◽  
Background Gas
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