Evaluation of optical parameters and characterization of ultrasonically sprayed MgO films by spectroscopic ellipsometry

2013 ◽  
Vol 265 ◽  
pp. 709-713 ◽  
Author(s):  
S. Kurtaran ◽  
I. Akyuz ◽  
F. Atay
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Optical Parameters

Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors

2011 ◽  
Vol 1352 ◽  
Author(s):  
P. Petrik ◽  
H. Egger ◽  
S. Eiden ◽  
E. Agocs ◽  
M. Fried ◽  
...  
Keyword(s):  
Refractive Index ◽  
Wavelength Range ◽  
Spectroscopic Ellipsometry ◽  
High Refractive Index ◽  
Optical Quality ◽  
Nanocomposite Films ◽  
Optical Parameters ◽  
Sensor Applications ◽  
Preparation Conditions

ABSTRACTCreating optical quality thin films with a high refractive index is increasingly important for waveguide sensor applications. In this study, we present optical models to measure the layer thickness, vertical and lateral homogeneity, the refractive index and the extinction coefficients of the polymer films with nanocrystal inclusions using spectroscopic ellipsometry. The optical properties can be determined in a broad wavelength range from 190 to 1700 nm. The sensitivity of spectroscopic ellipsometry allows a detailed characterization of the nanostructure of the layer, i.e. the surface roughness down to the nm scale, the interface properties, the optical density profile within the layer, and any other optical parameters that can be modeled in a proper and consistent way. In case of larger than about 50 nm particles even the particle size can be determined from the onset of depolarization due to light scattering. Besides the refractive index, the extinction coefficient, being a critical parameter for waveguiding layers, was also determined in a broad wavelength range. Using the above information from the ellipsometric models the preparation conditions can be identified. A range of samples were investigated including doctor bladed films using TiO2 nanoparticles.

Characterization of thin films from reflection and transmission ellipsometric parameters

2021 ◽  
Author(s):  
Lianhua Jin ◽  
Sota Mogi ◽  
Tsutomu MURANAKA ◽  
Eiichi KONDOH ◽  
Bernard Gelloz
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Single Point ◽  
Optical Parameters ◽  
Dispersion Models ◽  
Reflection And Transmission ◽  
Spectroscopic Information ◽  
Spectroscopic Ellipsometry Measurement ◽  
Ellipsometry Measurement

Abstract Spectroscopic ellipsometry is a powerful tool for characterization of thin films / surfaces. To simultaneously extract optical constant and film thickness from ellipsometric parameters ψ and Δ, dispersion models of material’s refractive index and spectroscopic ellipsometry measurement have been often required. In this work, we propose an extraction method of optical parameters of thin films from the reflection and transmission ellipsometric parameters. This method necessitates neither spectroscopic information of ψ and Δ, nor dispersion models. Verification measurements were carried out with the single-point and imaging ellipsometers, respectively.

Optical characterization of hybrid PEDOT:PSS/Si heterostructures by spectroscopic ellipsometry

2021 ◽  
Vol 717 (1) ◽  
pp. 92-97
Author(s):  
O. S. Kondratenko ◽  
S. V. Mamykin ◽  
T. S. Lunko ◽  
I. B. Mamontova ◽  
V. R. Romanyuk
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Optical Characterization

scholarly journals Characterization of μc-Si:H/a-Si:H tandem solar cell structures by spectroscopic ellipsometry

2014 ◽  
Vol 571 ◽  
pp. 756-761 ◽  
Author(s):  
Daisuke Murata ◽  
Tetsuya Yuguchi ◽  
Hiroyuki Fujiwara
Keyword(s):  
Solar Cell ◽  
Spectroscopic Ellipsometry ◽  
Tandem Solar Cell ◽  
Cell Structures
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