Effect of the duty ratio on the indium tin oxide (ITO) film deposited by in-line pulsed DC magnetron sputtering method for resistive touch panel

Min Hyung Ahn; Eou-Sik Cho; Sang Jik Kwon

doi:10.1016/j.apsusc.2011.09.081

Effect of the duty ratio on the indium tin oxide (ITO) film deposited by in-line pulsed DC magnetron sputtering method for resistive touch panel

Applied Surface Science ◽

10.1016/j.apsusc.2011.09.081 ◽

2011 ◽

Vol 258 (3) ◽

pp. 1242-1248 ◽

Cited By ~ 43

Author(s):

Min Hyung Ahn ◽

Eou-Sik Cho ◽

Sang Jik Kwon

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Duty Ratio ◽

Dc Magnetron Sputtering ◽

Touch Panel ◽

Ito Film ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Electrical and surface properties of indium tin oxide (ITO) films by pulsed DC magnetron sputtering for organic light emitting diode as anode material

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.06.060 ◽

2010 ◽

Vol 205 ◽

pp. S129-S132 ◽

Cited By ~ 24

Author(s):

Eunkyoung Nam ◽

Young-Hun Kang ◽

Dong-Jin Son ◽

Donggeun Jung ◽

Sung-Jei Hong ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Light Emitting Diode ◽

Dc Magnetron Sputtering ◽

Light Emitting ◽

Organic Light Emitting Diode ◽

Organic Light ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Characterisation and Optimisation of Indium Tin Oxide Films Deposited by Pulsed DC Magnetron Sputtering for Heterojunction Silicon Wafer Solar Cell Applications

Energy Procedia ◽

10.1016/j.egypro.2013.05.044 ◽

2013 ◽

Vol 33 ◽

pp. 91-98 ◽

Cited By ~ 9

Author(s):

Mei Huang ◽

Ziv Hameiri ◽

Selvaraj Venkataraj ◽

Armin G. Aberle ◽

Thomas Mueller

Keyword(s):

Solar Cell ◽

Magnetron Sputtering ◽

Silicon Wafer ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering ◽

Tin Oxide Films

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Influence of discharge power and annealing temperature on the properties of indium tin oxide thin films prepared by pulsed-DC magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2015.08.019 ◽

2015 ◽

Vol 121 ◽

pp. 187-193 ◽

Cited By ~ 10

Author(s):

Mei Huang ◽

Ziv Hameiri ◽

Armin G. Aberle ◽

Thomas Mueller

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Annealing Temperature ◽

Discharge Power ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Effects of the Duty Ratio on the Niobium Oxide Film Deposited by Pulsed-DC Magnetron Sputtering Methods

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2013.7816 ◽

2013 ◽

Vol 13 (11) ◽

pp. 7760-7765

Author(s):

Ji Mi Eom ◽

Hyun Gon Oh ◽

Il Hwan Cho ◽

Sang Jik Kwon ◽

Eou Sik Cho

Keyword(s):

Oxide Film ◽

Magnetron Sputtering ◽

Niobium Oxide ◽

Duty Ratio ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2021.110200 ◽

2021 ◽

Vol 188 ◽

pp. 110200

Author(s):

Sihui Wang ◽

Wei Wei ◽

Yonghao Gao ◽

Haibin Pan ◽

Yong Wang

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Effect of the substrate temperature on the properties of Ga-doped ZnO films for photovoltaic cell applications deposited by a pulsed DC magnetron sputtering with a rotating cylindrical target

Vacuum ◽

10.1016/j.vacuum.2012.03.002 ◽

2012 ◽

Vol 86 (10) ◽

pp. 1423-1427 ◽

Cited By ~ 17

Author(s):

Ji-Hyeon Park ◽

Beom-Ki Shin ◽

Hong-Man Moon ◽

Min-Jung Lee ◽

Kang-Il Park ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Photovoltaic Cell ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Cylindrical Target ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

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Low Frequency Noise Characteristics on Al/Nb2O5/p-type Schottky Diode Fabricated by Pulsed DC Magnetron Sputtering

Molecular Crystals and Liquid Crystals ◽

10.1080/15421406.2013.853551 ◽

2013 ◽

Vol 586 (1) ◽

pp. 168-178

Author(s):

Hyun Gon Oh ◽

Kyung Soo Kim ◽

Jimi Eom ◽

Sang Jik Kwon ◽

Eou Sik Cho ◽

...

Keyword(s):

Magnetron Sputtering ◽

Schottky Diode ◽

Low Frequency ◽

Frequency Noise ◽

Low Frequency Noise ◽

Dc Magnetron Sputtering ◽

Noise Characteristics ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering ◽

P Type

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High Mobility Titanium-doped Indium Oxide for Use in Tandem Solar Cells Deposited via Pulsed DC Magnetron Sputtering

Energy Procedia ◽

10.1016/j.egypro.2014.12.357 ◽

2014 ◽

Vol 60 ◽

pp. 148-155 ◽

Cited By ~ 6

Author(s):

B. Grew ◽

J.W. Bowers ◽

F. Lisco ◽

N. Arnou ◽

J.M. Walls ◽

...

Keyword(s):

Solar Cells ◽

Magnetron Sputtering ◽

Indium Oxide ◽

High Mobility ◽

Dc Magnetron Sputtering ◽

Tandem Solar Cells ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Growth of Highly -Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed dc Magnetron Sputtering

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.93.287 ◽

2003 ◽

Vol 93 ◽

pp. 287-294

Author(s):

P. Reinig ◽

F. Fenske ◽

A. Schöpke ◽

B. Selle ◽

W. Fuhs ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Crystalline Silicon ◽

Dc Magnetron Sputtering ◽

Silicon Thin Films ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Time-resolved optical emission spectroscopy of pulsed DC magnetron sputtering plasmas

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/38/11/018 ◽

2005 ◽

Vol 38 (11) ◽

pp. 1769-1780 ◽

Cited By ~ 24

Author(s):

J Lopez ◽

W Zhu ◽

A Freilich ◽

A Belkind ◽

K Becker

Keyword(s):

Magnetron Sputtering ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Dc Magnetron Sputtering ◽

Time Resolved ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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