Synthesis and characterization of silicon carbonitride films by plasma enhanced chemical vapor deposition (PECVD) using bis(dimethylamino)dimethylsilane (BDMADMS), as membrane for a small molecule gas separation

2010 ◽  
Vol 257 (4) ◽  
pp. 1196-1203 ◽  
Author(s):  
W. Kafrouni ◽  
V. Rouessac ◽  
A. Julbe ◽  
J. Durand
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Separation ◽  
Small Molecule ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Silicon Carbonitride ◽  
Synthesis And Characterization

Synthesis and characterization of nanostructured molybdenum oxynitride films fabricated by sub-atmospheric chemical vapor deposition

2019 ◽  
Vol 808 ◽  
pp. 151470
Author(s):  
Vladislav Dřínek ◽  
Mariana Klementová ◽  
Lukáš Palatinus ◽  
Pavel Dytrych ◽  
Radek Fajgar ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Synthesis And Characterization

scholarly journals Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WN x C y Thin Films

2018 ◽  
Vol 2018 (1) ◽  
pp. 46-53 ◽  
Author(s):  
Michelle M. Nolan ◽  
Alexander J. Touchton ◽  
Nathaniel E. Richey ◽  
Ion Ghiviriga ◽  
James R. Rocca ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Synthesis And Characterization

Synthesis and Characterization of Silicon Nanowires on Mesophase Carbon Microbead Substrates by Chemical Vapor Deposition

2005 ◽  
Vol 109 (8) ◽  
pp. 3291-3297 ◽  
Author(s):  
Wei-Na Li ◽  
Yun-Shuang Ding ◽  
Jikang Yuan ◽  
Sinue Gomez ◽  
Steven L. Suib ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Silicon Nanowires ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Synthesis And Characterization
Sign in / Sign up

Export Citation Format

Share Document