Probing mechanical properties of thin film and ceramic materials in micro- and nano-scale using indentation techniques

2010 ◽  
Vol 256 (24) ◽  
pp. 7583-7590 ◽  
Author(s):  
Costas A. Charitidis
1999 ◽  
Vol 594 ◽  
Author(s):  
J. G. Swadener ◽  
G. M. Pharr

AbstractSpherical indentation with continuous load and depth measurement is a useful technique for characterizing thin film mechanical properties. With this technique, the initial loading is in the elastic range. Therefore the elastic-plastic transition can be observed. However, the calibration of spherical indenters presents special problems. First, the radius of the indenter at the point of contact must be determined, and any deviation from a spherical radius must be evaluated. The shape of the indenter also causes mounting difficulties that can create a relatively large and nonlinear compliance in the testing machine. The calibration of spherical indenters is further complicated, because asperities on the indenter and surface roughness add to the uncertainty in locating the surface of the sample. In addition, spherical indenters are generally made of anisotropic single crystals, and the calculation of their elastic responses must include this anisotropy. To address these issues, a methodology has been developed for the calibration of spherical indenters, whereby indentation experiments are conducted on multiple ceramic materials in the elastic range. The method was used to determine the local radius of synthetic sapphire spherical indenters. The accuracy of this measurement was verified using confocal microscopy. The method was successfully applied to an indenter with a nonlinear machine compliance. Further results involving indentation in the plastic regime are also presented.


2004 ◽  
Vol 471-472 ◽  
pp. 260-263
Author(s):  
Bin Zou ◽  
Chuan Zhen Huang ◽  
Han Lian Liu ◽  
Sui Lian Wang

Nano-scale ceramic materials are very suitable to be used as the high speed cutting tool owing to their excellent properties. The incorporation of nano-scale second phase, such as SiC and Ti(CxN1-x) particles, into a ceramic matrix can lead to an improvement in mechanical properties, which is contributed to a change in microstructure. However, the differences between nano-scale ceramic materials and monoclinic ceramic materials can be found through fabricating these two kinds of materials. Firstly the changes in microstructure that will affect the mechanical properties of the nano-scale ceramic materials are investigated as the nano-ceramic tools are compared with the monolithic ceramic tools. Secondly the effect of microstructure on the mechanical properties is discussed. Finally the microstructure formation mechanism of nano-ceramic materials is given on the bases of some hypotheses.


Author(s):  
Gyeung Ho Kim ◽  
Mehmet Sarikaya ◽  
D. L. Milius ◽  
I. A. Aksay

Cermets are designed to optimize the mechanical properties of ceramics (hard and strong component) and metals (ductile and tough component) into one system. However, the processing of such systems is a problem in obtaining fully dense composite without deleterious reaction products. In the lightweight (2.65 g/cc) B4C-Al cermet, many of the processing problems have been circumvented. It is now possible to process fully dense B4C-Al cermet with tailored microstructures and achieve unique combination of mechanical properties (fracture strength of over 600 MPa and fracture toughness of 12 MPa-m1/2). In this paper, microstructure and fractography of B4C-Al cermets, tested under dynamic and static loading conditions, are described.The cermet is prepared by infiltration of Al at 1150°C into partially sintered B4C compact under vacuum to full density. Fracture surface replicas were prepared by using cellulose acetate and thin-film carbon deposition. Samples were observed with a Philips 3000 at 100 kV.


Author(s):  
Arnaud Valour ◽  
Maria Alejandra Usuga Higuita ◽  
Gaylord Guillonneau ◽  
Nicolas Crespo-Monteiro ◽  
Damien Jamon ◽  
...  

2003 ◽  
Vol 766 ◽  
Author(s):  
Jin-Heong Yim ◽  
Jung-Bae Kim ◽  
Hyun-Dam Jeong ◽  
Yi-Yeoul Lyu ◽  
Sang Kook Mah ◽  
...  

AbstractPorous low dielectric films containing nano pores (∼20Å) with low dielectric constant (<2.2), have been prepared by using various kinds of cyclodextrin derivatives as porogenic materials. The pore structure such as pore size and interconnectivity can be controlled by changing functional groups of the cyclodextrin derivatives. We found that mechanical properties of porous low-k thin film prepared with mCSSQ (modified cyclic silsesquioxane) precursor and cyclodextrin derivatives were correlated with the pore interconnection length. The longer the interconnection length of nanopores in the thin film, the worse the mechanical properties of the thin film (such as hardness and modulus) even though the pore diameter of the films were microporous (∼2nm).


Author(s):  
M. A. Kostytsyn ◽  
D. S. Muratov ◽  
D. V. Lysov ◽  
K. O. Chuprunov ◽  
A. G. Yudin ◽  
...  

2000 ◽  
Vol 657 ◽  
Author(s):  
Youngman Kim ◽  
Sung-Ho Choo

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.


2010 ◽  
Vol 431-432 ◽  
pp. 523-526
Author(s):  
Han Lian Liu ◽  
Chuan Zhen Huang ◽  
Shou Rong Xiao ◽  
Hui Wang ◽  
Ming Hong

Under the liquid-phase hot-pressing technique, the multi-scale titanium diboride matrix nanocomposite ceramic tool materials were fabricated by adding both micro-scale and nano-scale TiN particles into TiB2 with Ni and Mo as sintering aids. The effect of content of nano-scale TiN and sintering temperature on the microstructure and mechanical properties was studied. The result showed that flexural strength and fracture toughness of the composites increased first, and then decreased with an increase of the content of nano-scale TiN, while the Vickers hardness decreased with an increase of the content of nano-scale TiN. The optimal mechanical properties were flexural strength 742 MPa, fracture toughness 6.5 MPa•m1/2 and Vickers hardness 17GPa respectively. The intergranular and transgranular fracture mode were observed in the composites. The metal phase can cause ductility toughening and crack bridging, while crack deflection and transgranular fracture mode could be brought by micro-scale TiN and nano-scale TiN respectively.


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