Effect of radio frequency power on the inductively coupled plasma etched Al0.65Ga0.35N surface

2010 ◽  
Vol 256 (21) ◽  
pp. 6254-6258 ◽  
Author(s):  
Y. Bai ◽  
J. Liu ◽  
P. Ma ◽  
B. Li ◽  
J. Zhu ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Radio Frequency Power ◽  
Inductively Coupled ◽  
Frequency Power

Design and Construction of a Low-Flow, Low-Power Torch for Inductively Coupled Plasma Spectrometry

1982 ◽  
Vol 36 (6) ◽  
pp. 627-631 ◽  
Author(s):  
R. Rezaaiyaan ◽  
G. M. Hieftje ◽  
H. Anderson ◽  
H. Kaiser ◽  
B. Meddings
Keyword(s):  
Low Power ◽  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Low Flow ◽  
Plasma Spectrometry ◽  
Inductively Coupled ◽  
Plasma Ignition ◽  
Spatial Dimensions ◽  
Inner Diameter ◽  
Frequency Power

A detailed study of the importance of various spatial dimensions in an ICP torch is described. Of the various dimensions which were examined, the annular spacing between the coolant (outer) and plasma (flared) tube is the most critical for plasma stabilization at low argon coolant flows and applied radio-frequency powers. Similarly, the inner diameter of the aerosol injection tube was found to be important, with the value of 1.0 mm chosen for a compromise between low-power, low-flow capability and routine analysis of high-solids sample solutions. A constriction at the inlet of the coolant argon was found not to affect plasma stability greatly, but altered significantly the applied powers and coolant flows which were necessary for plasma ignition. With these and other torch dimensions optimized, it was found to be possible to ignite a plasma at a coolant flow of 5 L/min and an applied radio frequency power of 450 W. Continued operation of the plasma during analysis of real samples or during aspiration of a 1% NaCl solution was found to be possible alternatively at 500 W (rf power) and 3.5 L/min coolant argon or 125 W and 5.5 L/min, respectively.

scholarly journals Power Dissipation of an Inductively Coupled Plasma Torch under E Mode Dominated Regime

Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 834
Author(s):  
Nan Yu ◽  
Renaud Jourdain ◽  
Mustapha Gourma ◽  
Fangda Xu ◽  
Adam Bennett ◽  
...  
Keyword(s):  
Power Dissipation ◽  
Inductively Coupled Plasma ◽  
Plasma Torch ◽  
Electrical Response ◽  
Inductively Coupled ◽  
De Laval Nozzle ◽  
Surface Fabrication ◽  
Icp Torch ◽  
Frequency Power

This paper focuses on the power dissipation of a plasma torch used for an optical surface fabrication process. The process utilizes an inductively coupled plasma (ICP) torch that is equipped with a De-Laval nozzle for the delivery of a highly collimated plasma jet. The plasma torch makes use of a self-igniting coil and an intermediate co-axial tube made of alumina. The torch has a distinctive thermal and electrical response compared to regular ICP torches. In this study, the results of the power dissipation investigation reveal the true efficiency of the torch and discern its electrical response. By systematically measuring the coolant parameters (temperature change and flow rate), the power dissipation is extrapolated. The radio frequency power supply is set to 800 W, E mode, throughout the research presented in this study. The analytical results of power dissipation, derived from the experiments, show that 15.4% and 33.3% are dissipated by the nozzle and coil coolant channels, respectively. The experiments also enable the determination of the thermal time constant of the plasma torch for the entire range of RF power.

scholarly journals High performance metal–insulator–graphene diodes for radio frequency power detection application

Nanoscale ◽  
2017 ◽  
Vol 9 (33) ◽  
pp. 11944-11950 ◽  
Author(s):  
Mehrdad Shaygan ◽  
Zhenxing Wang ◽  
Mohamed Saeed Elsayed ◽  
Martin Otto ◽  
Giuseppe Iannaccone ◽  
...  
Keyword(s):  
Radio Frequency ◽  
High Performance ◽  
Radio Frequency Power ◽  
Metal Insulator ◽  
Frequency Power

Metal–insulator–graphene diodes are proved to be able to deliver high performance, and meanwhile are suitable for radiofrequency power detection.

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