Nanolayered multilayer coatings of CrN/CrAlN prepared by reactive DC magnetron sputtering

2007 ◽  
Vol 253 (11) ◽  
pp. 5076-5083 ◽  
Author(s):  
Harish C. Barshilia ◽  
B. Deepthi ◽  
N. Selvakumar ◽  
Anjana Jain ◽  
K.S. Rajam
Keyword(s):  
Magnetron Sputtering ◽  
Multilayer Coatings ◽  
Dc Magnetron Sputtering

Multilayer Coatings for Focusing Hard X-ray Telescopes

1998 ◽  
Vol 551 ◽  
Author(s):  
A. Ivan ◽  
R. Bruni ◽  
K. Byun ◽  
J. Everett ◽  
P. Gorenstein ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Single Layer ◽  
Multilayer Coatings ◽  
Dc Magnetron Sputtering ◽  
Film Properties ◽  
Auger Analysis ◽  
Cross Sectional ◽  
X Ray ◽  
Specular Reflectivity

AbstractSeveral multilayer test coatings for hard X-ray telescopes were fabricated using DC magnetron sputtering. The process parameters were selected from a series of trials of single layer depositions. The samples were characterized using X-ray specular reflectivity scans, AFM, and cross-sectional TEM. Additional measurements (stylus profilometry, RBS, and Auger analysis) were used in the optimization of the deposition rate and of the thin film properties (density, composition, surface/interface microroughness). The X-ray reflectivity scans showed that the combinations of reflector and spacer materials tested so far (W/Si and W/C) are suited for graded d-spacing multilayer coatings that present a constant reflectivity bandpass up to 70 keV.

Nanoindentation, Nanoscratch and Wear Studies on Nanoscale Multilayer TiN/CrN Coatings

2009 ◽  
Author(s):  
Manohar S. Konchady ◽  
Sergey Yarmolenko ◽  
Devdas M. Pai ◽  
Jag Sankar
Keyword(s):  
Stainless Steel ◽  
Magnetron Sputtering ◽  
Sliding Wear ◽  
Multilayer Coatings ◽  
Maximum Hardness ◽  
Dc Magnetron Sputtering ◽  
Wear Performance ◽  
Steel Substrates ◽  
Hardness Values ◽  
Crn Coatings

In the present study, multilayer TiN/CrN coatings at different bilayer thicknesses have been deposited on silicon (100) and 316 stainless steel substrates using reactive DC magnetron sputtering technique. Nanoindentation, nanoscratch and ball-on-disk tribometer tests were used to characterize the films. Nanoindentation measurements showed enhancement in hardness values for all multilayer coatings with maximum hardness reaching 34 GPa which is about 45% improvement over the rule of mixtures. Nanoscratch tests revealed higher critical loads for multilayer coatings compared to monolayer TiN and CrN coatings. The tribometer tests showed better sliding wear performance for TiN/CrN superlattices.

Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

2013 ◽  
Vol 27 (10) ◽  
pp. 1112-1116 ◽  
Author(s):  
Ke-Wei SUN ◽  
Wan-Cheng ZHOU ◽  
Shan-Shan HUANG ◽  
Xiu-Feng TANG
Keyword(s):  
Magnetron Sputtering ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno ◽  
Sputtering Pressure

Structure and Optical Properties CdS and CdTe Films on Flexible Substrate Obtained by DC Magnetron Sputtering for Solar Cells

2017 ◽  
Vol 9 (5) ◽  
pp. 05035-1-05035-6 ◽  
Author(s):  
G. I. Kopach ◽  
◽  
R. P. Mygushchenko ◽  
G. S. Khrypunov ◽  
A. I. Dobrozhan ◽  
...  
Keyword(s):  
Optical Properties ◽  
Solar Cells ◽  
Magnetron Sputtering ◽  
Flexible Substrate ◽  
Dc Magnetron Sputtering ◽  
Cdte Films
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