Effects of annealing temperature and method on structural and optical properties of TiO2 films prepared by RF magnetron sputtering at room temperature

Dongsun Yoo; Ilgon Kim; Sangsoo Kim; Chang Hie Hahn; Changyu Lee; Seongjin Cho

doi:10.1016/j.apsusc.2006.08.019

Effects of annealing temperature and method on structural and optical properties of TiO2 films prepared by RF magnetron sputtering at room temperature

Applied Surface Science ◽

10.1016/j.apsusc.2006.08.019 ◽

2007 ◽

Vol 253 (8) ◽

pp. 3888-3892 ◽

Cited By ~ 112

Author(s):

Dongsun Yoo ◽

Ilgon Kim ◽

Sangsoo Kim ◽

Chang Hie Hahn ◽

Changyu Lee ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Room Temperature ◽

Annealing Temperature ◽

Rf Magnetron Sputtering ◽

Tio2 Films ◽

Structural And Optical Properties

Download Full-text

Variation of structural and optical properties of TiO2 films prepared by DC magnetron sputtering method with annealing temperature

Materials Science and Engineering B ◽

10.1016/j.mseb.2020.114782 ◽

2020 ◽

Vol 262 ◽

pp. 114782

Author(s):

Sibel Gürakar ◽

Hakan Ot ◽

Seyda Horzum ◽

Tülay Serin

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Annealing Temperature ◽

Tio2 Films ◽

Dc Magnetron Sputtering ◽

Structural And Optical Properties

Download Full-text

Effect of annealing temperature on the structural and optical properties of Al-doped ZnO films by RF magnetron sputtering

10.1117/12.792374 ◽

2008 ◽

Author(s):

Yuebo Wu ◽

Bo Huang ◽

Liangtang Zhang ◽

Suntao Wu

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Annealing Temperature ◽

Rf Magnetron Sputtering ◽

Zno Films ◽

Structural And Optical Properties ◽

Doped Zno

Download Full-text

Influence of oxygen gas content on the structural and optical properties of ZnO thin films deposited by RF magnetron sputtering at room temperature

Rare Metals ◽

10.1007/s12598-011-0219-3 ◽

2011 ◽

Vol 30 (2) ◽

pp. 170-174 ◽

Cited By ~ 8

Author(s):

Baoting Liu ◽

Yang Zhou ◽

Hongfang Zheng ◽

Man Li ◽

Zhe Guo ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Room Temperature ◽

Rf Magnetron Sputtering ◽

Gas Content ◽

Zno Thin Films ◽

Structural And Optical Properties ◽

Oxygen Gas

Download Full-text

Effect of Process Parameters and Post Annealing Temperature on Structural and Optical Properties of MgTiO3 Thin Films Deposited by RF Magnetron Sputtering

Springer Proceedings in Physics - Advanced Nanomaterials and Nanotechnology ◽

10.1007/978-3-642-34216-5_30 ◽

2013 ◽

pp. 291-300 ◽

Cited By ~ 2

Author(s):

T. Santhosh Kumar ◽

R. K. Bhuyan ◽

A. Perumal ◽

D. Pamu

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Process Parameters ◽

Annealing Temperature ◽

Rf Magnetron Sputtering ◽

Structural And Optical Properties ◽

Post Annealing ◽

Post Annealing Temperature

Download Full-text

Effect of annealing temperature on the structural and optical properties of ZnO thin films prepared by RF magnetron sputtering

Physica B Condensed Matter ◽

10.1016/j.physb.2010.01.039 ◽

2010 ◽

Vol 405 (7) ◽

pp. 1782-1786 ◽

Cited By ~ 46

Author(s):

Georgi P. Daniel ◽

V.B. Justinvictor ◽

Prabitha B. Nair ◽

K. Joy ◽

Peter Koshy ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Annealing Temperature ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties

Download Full-text

Structural and optical properties of N-doped β-Ga2O3 films deposited by RF magnetron sputtering

Physica B Condensed Matter ◽

10.1016/j.physb.2011.05.011 ◽

2011 ◽

Vol 406 (15-16) ◽

pp. 3079-3082 ◽

Cited By ~ 27

Author(s):

Yijun Zhang ◽

Jinliang Yan ◽

Qingshan Li ◽

Chong Qu ◽

Liying Zhang ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Structural And Optical Properties

Download Full-text

Effect of substrate temperature on structural and optical properties of nanostructured ZnO thin films grown by RF magnetron sputtering

International Conference on Nanoscience, Engineering and Technology (ICONSET 2011) ◽

10.1109/iconset.2011.6167911 ◽

2011 ◽

Cited By ~ 3

Author(s):

G. Anil Kumar ◽

M. V. Ramana Reddy ◽

Katta Narasimha Reddy

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties

Download Full-text

Effect of substrates temperature on structural and optical properties indium tin oxide prepared by RF magnetron sputtering

2016 IEEE Student Conference on Research and Development (SCOReD) ◽

10.1109/scored.2016.7810082 ◽

2016 ◽

Author(s):

Mohammad Farid Bin Mohd Nasir ◽

Mohamad Hafiz Mamat

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Rf Magnetron Sputtering ◽

Structural And Optical Properties

Download Full-text

Electrical and optical properties of nanosized films of doped zinc and indium oxides deposited by RF magnetron sputtering at room temperature

Technical Physics Letters ◽

10.1134/s1063785015080325 ◽

2015 ◽

Vol 41 (8) ◽

pp. 804-806 ◽

Cited By ~ 4

Author(s):

D. V. Sosnin ◽

D. A. Kudryashov ◽

S. A. Gudovskikh ◽

K. S. Zelentsov

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Room Temperature ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Indium Oxides ◽

Nanosized Films

Download Full-text

Influence of hydrogen on structural and optical properties of low temperature polycrystalline Ge films deposited by RF magnetron sputtering

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2010.06.008 ◽

2010 ◽

Vol 312 (19) ◽

pp. 2647-2655 ◽

Cited By ~ 14

Author(s):

Chao-Yang Tsao ◽

Patrick Campbell ◽

Dengyuan Song ◽

Martin A. Green

Keyword(s):

Optical Properties ◽

Low Temperature ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Structural And Optical Properties

Download Full-text