Two-dimensional recrystallisation processes of nanometric vanadium oxide thin films grown by atomic layer chemical vapor deposition (ALCVD) evidenced by AFM

2006 ◽  
Vol 252 (16) ◽  
pp. 5917-5925 ◽  
Author(s):  
H. Groult ◽  
E. Balnois ◽  
A. Mantoux ◽  
K. Le Van ◽  
D. Lincot
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vanadium Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Atomic Layer ◽  
Two Dimensional ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films

Vanadyl Precursors Used to Modify the Properties of Vanadium Oxide Thin Films Obtained by Chemical Vapor Deposition

1999 ◽  
Vol 146 (2) ◽  
pp. 551-558 ◽  
Author(s):  
Davide Barreca ◽  
Laura E. Depero ◽  
Enrico Franzato ◽  
Gian Andrea Rizzi ◽  
Luigi Sangaletti ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vanadium Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films
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