Integrated description for random adsorption and 2D-island growth kinetics in thin film growth: Autocatalytic-reaction model and kinetic Monte Carlo simulation

2006 ◽  
Vol 252 (16) ◽  
pp. 5900-5906 ◽  
Author(s):  
Hideaki Togashi ◽  
Yoshiharu Enta ◽  
Maki Suemitsu
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Growth Kinetics ◽  
Film Growth ◽  
Kinetic Monte Carlo ◽  
Reaction Model ◽  
Thin Film Growth ◽  
Autocatalytic Reaction ◽  
Island Growth

Kinetic Monte Carlo simulation of Cu thin film growth

Vacuum ◽  
2004 ◽  
Vol 72 (4) ◽  
pp. 405-410 ◽  
Author(s):  
Peifeng Zhang ◽  
Xiaoping Zheng ◽  
Suoping Wu ◽  
Jun Liu ◽  
Deyan He
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Film Growth ◽  
Kinetic Monte Carlo ◽  
Thin Film Growth ◽  
Kinetic Monte Carlo Simulation ◽  
Cu Thin Film

scholarly journals Surface Structure and Void Formation in Thin Film Growth: A Monte Carlo Simulation

2000 ◽  
Vol 138 ◽  
pp. 126-127
Author(s):  
Yutaka Kaneko ◽  
Yasuaki Hiwatari ◽  
Katsuhiko Ohara ◽  
Tohru Murakami
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Surface Structure ◽  
Film Growth ◽  
Void Formation ◽  
Thin Film Growth
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