Characteristics of Cu films prepared using a magnetron sputter type negative ion source (MSNIS)

Namwoong Paik

doi:10.1016/j.apsusc.2005.03.204

Characteristics of Cu films prepared using a magnetron sputter type negative ion source (MSNIS)

Applied Surface Science ◽

10.1016/j.apsusc.2005.03.204 ◽

2005 ◽

Vol 252 (5) ◽

pp. 1812-1817 ◽

Cited By ~ 3

Author(s):

Namwoong Paik

Keyword(s):

Ion Source ◽

Negative Ion ◽

Cu Films ◽

Magnetron Sputter

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Characteristics of Cu films prepared using a magnetron sputter type negative ion source (MSNIS)

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2004.12.123 ◽

2005 ◽

Vol 229 (3-4) ◽

pp. 436-442 ◽

Cited By ~ 3

Author(s):

Namwoong Paik

Keyword(s):

Ion Source ◽

Negative Ion ◽

Cu Films ◽

Magnetron Sputter

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The characterization of a magnetron-sputter-type negative-ion source

Review of Scientific Instruments ◽

10.1063/1.1445865 ◽

2002 ◽

Vol 73 (3) ◽

pp. 1212-1216 ◽

Cited By ~ 12

Author(s):

Nam-Woong Paik ◽

Steven Kim

Keyword(s):

Ion Source ◽

Negative Ion ◽

Magnetron Sputter

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Raman and XPS studies of DLC films prepared by a magnetron sputter-type negative ion source

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2004.08.073 ◽

2005 ◽

Vol 200 (7) ◽

pp. 2170-2174 ◽

Cited By ~ 130

Author(s):

Namwoong Paik

Keyword(s):

Ion Source ◽

Negative Ion ◽

Magnetron Sputter

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Characterization of diamond-like carbon (DLC) films deposited by a magnetron-sputter-type negative ion source (MSNIS)

Applied Surface Science ◽

10.1016/j.apsusc.2003.10.047 ◽

2004 ◽

Vol 226 (4) ◽

pp. 412-421 ◽

Cited By ~ 6

Author(s):

Namwoong Paik

Keyword(s):

Ion Source ◽

Negative Ion ◽

Diamond Like Carbon ◽

Magnetron Sputter

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Field emission characteristics of Diamond-like Carbon (DLC) films prepared using a Magnetron Sputter-type Negative Ion Source (MSNIS)

Diamond and Related Materials ◽

10.1016/j.diamond.2005.04.009 ◽

2005 ◽

Vol 14 (9) ◽

pp. 1556-1561 ◽

Cited By ~ 20

Author(s):

Namwoong Paik

Keyword(s):

Field Emission ◽

Ion Source ◽

Negative Ion ◽

Diamond Like Carbon ◽

Emission Characteristics ◽

Magnetron Sputter

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High-density DLC films prepared using a magnetron sputter type negative ion source

Diamond and Related Materials ◽

10.1016/j.diamond.2004.11.005 ◽

2005 ◽

Vol 14 (2) ◽

pp. 196-200 ◽

Cited By ~ 8

Author(s):

Namwoong Paik

Keyword(s):

Ion Source ◽

High Density ◽

Negative Ion ◽

Magnetron Sputter

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Metal negative ion production by a planar magnetron sputter type radio frequency ion source

10.1063/1.4995780 ◽

2017 ◽

Cited By ~ 1

Author(s):

K. Yoshioka ◽

S. Kanda ◽

T. Kasuya ◽

M. Wada

Keyword(s):

Radio Frequency ◽

Ion Source ◽

Negative Ion ◽

Planar Magnetron ◽

Ion Production ◽

Magnetron Sputter

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The stability of SiO2 films prepared using a magnetron sputter type negative ion source (MSNIS)

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2004.11.004 ◽

2005 ◽

Vol 229 (1) ◽

pp. 85-91 ◽

Cited By ~ 3

Author(s):

Namwoong Paik

Keyword(s):

Ion Source ◽

Negative Ion ◽

Sio2 Films ◽

Magnetron Sputter ◽

The Stability

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Numerical Study of the H0 Atomic Density and the Balmer Line Intensity Profiles in a Hydrogen Negative Ion Source with the Effect of Non-Equilibrium Electron Energy Distribution Function

Plasma and Fusion Research ◽

10.1585/pfr.9.1401011 ◽

2014 ◽

Vol 9 (0) ◽

pp. 1401011-1401011 ◽

Cited By ~ 5

Author(s):

Takanori SHIBATA ◽

Mieko KASHIWAGI ◽

Akiyoshi HATAYAMA ◽

Keiji SAWADA ◽

Takashi INOUE ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Line Intensity ◽

Electron Energy Distribution Function ◽

Numerical Study ◽

Ion Source ◽

Energy Distribution Function ◽

Negative Ion ◽

Balmer Line

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First result of CRDS system with cesium operation for radiofrequency negative ion source test facility at ASIPP

Fusion Engineering and Design ◽

10.1016/j.fusengdes.2021.112266 ◽

2021 ◽

Vol 166 ◽

pp. 112266

Author(s):

Lizhen Liang ◽

Chundong Hu ◽

Wei Liu ◽

Jianglong Wei ◽

Yongjian Xu ◽

...

Keyword(s):

Ion Source ◽

Negative Ion ◽

Test Facility ◽

Source Test

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