Tight-binding quantum chemical molecular dynamics simulation of boron activation process in crystalline silicon

2005 ◽  
Vol 244 (1-4) ◽  
pp. 30-33 ◽  
Author(s):  
Tsuyoshi Masuda ◽  
Katsumi Sasata ◽  
Mohamed Elanany ◽  
Michihisa Koyama ◽  
Momoji Kubo ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Quantum Chemical ◽  
Crystalline Silicon ◽  
Tight Binding ◽  
Dynamics Simulation ◽  
Activation Process ◽  
Quantum Chemical Molecular Dynamics

Quantum Chemical Molecular Dynamics Simulation of the Plasma Etching Processes

2003 ◽  
Vol 42 (Part 1, No. 4B) ◽  
pp. 1859-1864 ◽  
Author(s):  
Katsumi Sasata ◽  
Toshiyuki Yokosuka ◽  
Hitoshi Kurokawa ◽  
Seiichi Takami ◽  
Momoji Kubo ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Plasma Etching ◽  
Quantum Chemical ◽  
Dynamics Simulation ◽  
Quantum Chemical Molecular Dynamics
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