Wavelength dependence of the single pulse femtosecond laser ablation threshold of indium phosphide in the 400–2050nm range

2005 ◽  
Vol 243 (1-4) ◽  
pp. 129-137 ◽  
Author(s):  
A. Borowiec ◽  
H.F. Tiedje ◽  
H.K. Haugen
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Indium Phosphide ◽  
Ablation Threshold ◽  
Femtosecond Laser Ablation ◽  
Single Pulse ◽  
Wavelength Dependence

scholarly journals Wavelength dependence of femtosecond laser ablation threshold of corneal stroma

2008 ◽  
Vol 16 (6) ◽  
pp. 4121 ◽  
Author(s):  
G. Olivié ◽  
D. Giguère ◽  
F. Vidal ◽  
T. Ozaki ◽  
J.-C. Kieffer ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Ablation Threshold ◽  
Corneal Stroma ◽  
Femtosecond Laser Ablation ◽  
Wavelength Dependence

scholarly journals Fabrication of an antireflection microstructure on AgClBr polycrystalline fiber by single pulse femtosecond laser ablation

2021 ◽  
Vol 11 (2) ◽  
pp. 487
Author(s):  
Mikhail K. Tarabrin ◽  
Andrey A. Bushunov ◽  
Andrei A. Teslenko ◽  
Tatiana Sakharova ◽  
Jonas Hinkel ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Femtosecond Laser Ablation ◽  
Single Pulse

scholarly journals Nanoscale-Precision Removal of Copper in Integrated Circuits Based on a Hybrid Process of Plasma Oxidation and Femtosecond Laser Ablation

Micromachines ◽  
2021 ◽  
Vol 12 (10) ◽  
pp. 1188
Author(s):  
Shuai Wang ◽  
Yaoyu Wang ◽  
Shizhuo Zhang ◽  
Lingfeng Wang ◽  
Shuai Chen ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Integrated Circuits ◽  
Femtosecond Laser ◽  
Copper Oxide ◽  
Ablation Threshold ◽  
Femtosecond Laser Ablation ◽  
Hybrid Process ◽  
Plasma Oxidation ◽  
Fs Laser ◽  
Application Potential

Copper (Cu) is the main interconnect conductor for integrated circuits (IC), and its processing quality is very important to device performance. Herein, a hybrid process of plasma oxidation and femtosecond laser (fs-laser) ablation was proposed for the nanoscale precision removal of Cu in integrated circuits. In this hybrid process, the surface layer of Cu was oxidized to the copper oxide by plasma oxidation, and then the fs-laser with a laser fluence lower than the Cu ablation threshold was used to remove the copper oxide without damaging the underlying Cu. Theoretically, the surface temperature evolutions of Cu and copper oxide under the femtosecond laser were studied by the two-temperature model, and it was revealed that the ablation threshold of copper oxide is much lower than that of Cu. The experimental results showed that the ablation threshold of copper oxide is lower than that of Cu, which is consistent with the theoretical analysis. Using the hybrid process, a surface roughness of 3 nm and a removal accuracy of 4 nm were obtained in the process of Cu film processing, which were better than those obtained by fs-laser ablation. This demonstrated that the hybrid process has good application potential in the field of copper micromachining.

Fabrication of antireflection microstructures on the surface of GaSe crystal by single-pulse femtosecond laser ablation

2020 ◽  
Vol 45 (21) ◽  
pp. 5994
Author(s):  
Andrey A. Bushunov ◽  
Andrei A. Teslenko ◽  
Mikhail K. Tarabrin ◽  
Vladimir A. Lazarev ◽  
Lyudmila I. Isaenko ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Femtosecond Laser Ablation ◽  
Single Pulse

Investigation of Femtosecond Laser Ablation Threshold for Nickel Template

2014 ◽  
Vol 633-634 ◽  
pp. 665-670 ◽  
Author(s):  
Lei Zhang ◽  
Xiao Wen Cao ◽  
Shun Guang Li ◽  
Ru Yi Xiang ◽  
Hui Chao Sun
Keyword(s):  
Femtosecond Laser ◽  
Ablation Threshold ◽  
Femtosecond Laser Ablation ◽  
Target Surface ◽  
Single Pulse ◽  
Normal Incidence ◽  
Objective Lens ◽  
Temperature Model ◽  
Two Temperature ◽  
Single Pulse Ablation

This paper presents a theoretical and experimental investigation into the ablation threshold of nickel template by femtosecond laser in air at atmospheric pressure. The laser pulses used for the study are 800 nm in wavelength, 100fs in pulse duration, and 1KHz in repetition rate. The two-temperature model is used to predict the single-pulse ablation threshold for nickel theoretically. Micro-hole ablation experiments are carried out in air by focusing the femtosecond laser beam on the nickel target surface at normal incidence with the long-focus objective lens of enlargement factor 50 and NA=0.7 to determine the single-pulse and multi-pulse ablation thresholds for nickel by setting up the relationship between the measured hole diameters and the pulse energies. The single pulse ablation threshold of 4132.98 Jm-2obtained experimentally is very close to that of 3907.99 Jm-2predicted by two-temperature model. The incubation factorξ, which describes the changes of the multi-pulse ablation thresholds with the number of pulses, is determined to be 0.812 for nickel.

Modeling and Fabrication of an Antireflection Microstructure on an AgClBr Fiber by Single-pulse Femtosecond Laser Ablation

2021 ◽  
Author(s):  
Mikhail Tarabrin ◽  
Andrey Bushunov ◽  
Andrei Teslenko ◽  
Vladimir Lazarev ◽  
Tatiana Sakharova ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Femtosecond Laser Ablation ◽  
Single Pulse
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