Laser-enhanced diffusion of nitrogen and aluminum dopants in silicon carbide

2006 ◽  
Vol 54 (16) ◽  
pp. 4273-4283 ◽  
Author(s):  
Z. Tian ◽  
N.R. Quick ◽  
A. Kar
Keyword(s):  
Silicon Carbide ◽  
Enhanced Diffusion

Enhanced Diffusion of High-Temperature Implanted Aluminum in Silicon Carbide

1995 ◽  
Vol 396 ◽  
Author(s):  
A V. Suvorov ◽  
I.O. Usov ◽  
V.V. Sokolov ◽  
A.A. Suvorova
Keyword(s):  
Silicon Carbide ◽  
Diffusion Coefficient ◽  
High Temperature ◽  
Secondary Ion Mass Spectrometry ◽  
Near Surface ◽  
Enhanced Diffusion ◽  
Thermally Activated ◽  
Transmission Electron ◽  
Radiation Enhanced Diffusion ◽  
Sic Wafer

AbstractThe diffusion of aluminum in silicon carbide during high-temperature A1+ ion implantation was studied using secondary ion mass spectrometry (SIMS). Transmission electron microscopy (TEM) has been used to determine the microstructure of the implanted sample. A 6H-SiC wafer was implanted at a temperature of 1800 °C with 40 keV Al ions to a dose of 2 x 1016 cm-2. It was established that an Al step-like profile starts at the interface between the crystal region and the damaged layer. The radiation enhanced diffusion coefficient of Al at the interface was determined to be Di = 2.8 x 10-12 cm2/s, about two orders of magnitude higher than the thermally activated diffusion coefficient. The Si vacancy-rich near-surface layer formed by this implantation condition is believed to play a significant role in enhanced Al diffusion.

Theoretical Model And Computer Simulation Results Of Enhanced Diffusion Of High-Temperature Implanted Aluminum In Silicon Carbide

1997 ◽  
Vol 483 ◽  
Author(s):  
G. V. Gadiyak
Keyword(s):  
Experimental Data ◽  
Silicon Carbide ◽  
Kinetic Model ◽  
Enhanced Diffusion ◽  
Al Content ◽  
Mobile Species ◽  
Simulation Results ◽  
Doping Profiles ◽  
Sic Films ◽  
Good Agreement

AbstractWide applications of silicon carbide (SiC) films in microelectronics devices make especially important predictions of the doping profiles during and/or after thermal treatment. A macroscopic kinetic model of enhanced diffusion of aluminum in SiC films during ion bombardment at high temperatures has been considered. The set of equations describing the kinetic model takes into account generation Vc and Csi vacancies during bombardment, migration of mobile species (Al) toward the surface and reactions of Al atoms with Vc and Vsi vacancies, as well as Al evolution from the film. The calculations were carried out for the flux of Al ions with energy 40 keV and current density 20 μA/cm2 to a dose 2 1016 cm−2 at 1800° C. The calculations have shown that the Al content in SiC at these condition does not exceed 40%. The calculation profile of Al is in a good agreement with experimental data [1].

Transient enhanced diffusion of implanted boron in 4H-silicon carbide

2000 ◽  
Vol 76 (11) ◽  
pp. 1434-1436 ◽  
Author(s):  
M. S. Janson ◽  
M. K. Linnarsson ◽  
A. Hallén ◽  
B. G. Svensson ◽  
N. Nordell ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Enhanced Diffusion ◽  
Transient Enhanced Diffusion

Field enhanced diffusion of nitrogen and boron in 4H–silicon carbide

2003 ◽  
Vol 94 (7) ◽  
pp. 4285-4290 ◽  
Author(s):  
G. J. Phelps ◽  
E. G. Chester ◽  
C. M. Johnson ◽  
N. G. Wright
Keyword(s):  
Silicon Carbide ◽  
Enhanced Diffusion

Irradiation behavior of pyrolytic silicon carbide

1983 ◽  
Vol 41 ◽  
pp. 72-73
Author(s):  
R. J. Lauf
Keyword(s):  
Silicon Carbide ◽  
Fission Products ◽  
Thermodynamics And Kinetics ◽  
Neutron Fluences ◽  
Fuel Particles ◽  
Sic Coatings ◽  
Irradiation Behavior ◽  
Kinetics Of ◽  
Htgr Fuel

Fuel particles for the High-Temperature Gas-Cooled Reactor (HTGR) contain a layer of pyrolytic silicon carbide to act as a miniature pressure vessel and primary fission product barrier. Optimization of the SiC with respect to fuel performance involves four areas of study: (a) characterization of as-deposited SiC coatings; (b) thermodynamics and kinetics of chemical reactions between SiC and fission products; (c) irradiation behavior of SiC in the absence of fission products; and (d) combined effects of irradiation and fission products. This paper reports the behavior of SiC deposited on inert microspheres and irradiated to fast neutron fluences typical of HTGR fuel at end-of-life.

Microstructural Evaluation of Silicon Carbide Whisker Reinforced Alumina Fabricated with Carbon-Coated Whiskers

1991 ◽  
Vol 49 ◽  
pp. 920-921
Author(s):  
K. B. Alexander ◽  
P. F. Becher
Keyword(s):  
Silicon Carbide ◽  
High Resolution Electron Microscopy ◽  
Ceramic Composites ◽  
Interface Debonding ◽  
Resolution Electron ◽  
Microstructural Evaluation ◽  
Carbon Coated ◽  
Electron Energy Loss ◽  
Interfacial Films ◽  
Debonding Process

The presence of interfacial films at the whisker-matrix interface can significantly influence the fracture toughness of ceramic composites. The film may alter the interface debonding process though changes in either the interfacial fracture energy or the residual stress at the interface. In addition, the films may affect the whisker pullout process through the frictional sliding coefficients or the extent of mechanical interlocking of the interface due to the whisker surface topography.Composites containing ACMC silicon carbide whiskers (SiCw) which had been coated with 5-10 nm of carbon and Tokai whiskers coated with 2 nm of carbon have been examined. High resolution electron microscopy (HREM) images of the interface were obtained with a JEOL 4000EX electron microscope. The whisker geometry used for HREM imaging is described in Reference 2. High spatial resolution (< 2-nm-diameter probe) parallel-collection electron energy loss spectroscopy (PEELS) measurements were obtained with a Philips EM400T/FEG microscope equipped with a Gatan Model 666 spectrometer.

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