Effects of the temperature and beam parameters on depth profiles in X-ray photoelectron spectrometry and secondary ion mass spectrometry under C60+–Ar+ cosputtering

2014 ◽  
Vol 852 ◽  
pp. 129-136 ◽  
Author(s):  
Hua-Yang Liao ◽  
Meng-Hung Tsai ◽  
Wei-Lun Kao ◽  
Ding-Yuan Kuo ◽  
Jing-Jong Shyue
Author(s):  
Lluís Yedra ◽  
C. N. Shyam Kumar ◽  
Alisa Pshenova ◽  
Esther Lentzen ◽  
Patrick Philipp ◽  
...  

The study demonstrates a new method to quantify Secondary Ion Mass Spectrometry (SIMS) images by using a synergetic combination of Energy Dispersive X-ray spectroscopy (EDX) and SIMS.


2010 ◽  
Vol 82 (19) ◽  
pp. 8291-8299 ◽  
Author(s):  
Alan M. Piwowar ◽  
John S. Fletcher ◽  
Jeanette Kordys ◽  
Nicholas P. Lockyer ◽  
Nicholas Winograd ◽  
...  

2014 ◽  
Vol 59 (2) ◽  
pp. 173-180 ◽  
Author(s):  
Bianca Kyriacou ◽  
Katie L. Moore ◽  
David Paterson ◽  
Martin D. de Jonge ◽  
Daryl L. Howard ◽  
...  

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