On the role of chemical steps in the anodic dissolution of illuminated n-type GaAs electrodes

1987 ◽  
Vol 228 (1-2) ◽  
pp. 77-88 ◽  
Author(s):  
S. Lingier ◽  
D. Vanmaekelbergh ◽  
W.P. Gomes
Keyword(s):  
1980 ◽  
Vol 10 (4) ◽  
pp. 543-547 ◽  
Author(s):  
G. H. Sedahmed ◽  
I. A. S. Mansour ◽  
A. A. Zatout ◽  
N. A. Abdel-Hay

1997 ◽  
Vol 42 (5) ◽  
pp. 879-885 ◽  
Author(s):  
G.M. Florianovich ◽  
R.M. Lazorenko-Manevich
Keyword(s):  

2020 ◽  
Vol 165 ◽  
pp. 108384
Author(s):  
C. Ubeda ◽  
G. Garces ◽  
P. Adeva ◽  
I. Llorente ◽  
G.S. Frankel ◽  
...  

1970 ◽  
Vol 38 (9) ◽  
pp. 644-648 ◽  
Author(s):  
Hiroshi YONEYAMA ◽  
Hideo TAMURA

1996 ◽  
Vol 118 (1) ◽  
pp. 29-36 ◽  
Author(s):  
M. Datta ◽  
R. V. Shenoy ◽  
L. T. Romankiw

The present paper reviews some fundamental aspects related to the understanding of the high rate anodic dissolution processes and their influence on thin film patterning by electrochemical micromachining. The role of convective mass transport and current distribution on the surface finish and shape evolution is discussed. Several examples of the applications of maskless and through-mask electrochemical micromachining are presented.


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