Recent Advances in the Study of Electrochemical Micromachining
1996 ◽
Vol 118
(1)
◽
pp. 29-36
◽
Keyword(s):
The present paper reviews some fundamental aspects related to the understanding of the high rate anodic dissolution processes and their influence on thin film patterning by electrochemical micromachining. The role of convective mass transport and current distribution on the surface finish and shape evolution is discussed. Several examples of the applications of maskless and through-mask electrochemical micromachining are presented.
1980 ◽
Vol 25
(10)
◽
pp. 1255-1262
◽
1980 ◽
Vol 25
(10)
◽
pp. 1263-1271
◽
2021 ◽
Vol 57
(1)
◽
pp. 10-18
1986 ◽
Vol 44
◽
pp. 732-733
Keyword(s):
2020 ◽
Vol 11
(SPL1)
◽
pp. 967-971
2016 ◽
Vol 120
(21)
◽
pp. 11498-11507
◽
Keyword(s):
Keyword(s):