Optical characterization of thin thermal oxide films on copper by ellipsometry
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1993 ◽
Vol 97
(32)
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pp. 8495-8503
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2009 ◽
Vol 7
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pp. 486-490
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2009 ◽
Vol 9
(9)
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pp. 5254-5261
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2007 ◽
Vol 46
(2)
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pp. 621-626
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