Relaxed Ge x Si 1−x layer formation with reduced dislocation density grown by ultrahigh vacuum chemical vapor deposition

2000 ◽  
Vol 70 (4) ◽  
pp. 449-451 ◽  
Author(s):  
G.L. Luo ◽  
P.Y. Chen ◽  
X.F. Lin ◽  
P. Tsien ◽  
T.W. Fan
Keyword(s):  
Chemical Vapor Deposition ◽  
Dislocation Density ◽  
Vapor Deposition ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Layer Formation

Properties of Si1 − x − y Ge x  C  y Epitaxial Films Grown by Ultrahigh Vacuum Chemical Vapor Deposition

1999 ◽  
Vol 146 (12) ◽  
pp. 4611-4618 ◽  
Author(s):  
S. John ◽  
E. J. Quinones ◽  
B. Ferguson ◽  
S. K. Ray ◽  
B. Anantharam ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Epitaxial Films

scholarly journals The control of graphene double-layer formation in copper-catalyzed chemical vapor deposition

Carbon ◽  
2012 ◽  
Vol 50 (10) ◽  
pp. 3682-3687 ◽  
Author(s):  
Martin Kalbac ◽  
Otakar Frank ◽  
Ladislav Kavan
Keyword(s):  
Chemical Vapor Deposition ◽  
Double Layer ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Layer Formation

Characteristics of polycrystalline films grown by ultrahigh vacuum chemical vapor deposition system

1995 ◽  
Vol 38 (12) ◽  
pp. 2029-2033
Author(s):  
Hsiao-Yi Lin ◽  
Tan Fu Lei ◽  
Horng-Chih Lin ◽  
Chun-Yen Chang ◽  
Ruey-Ching Twu ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Polycrystalline Films

Low-Temperature Epitaxial Growth of Silicon and Silicon-Germanium Alloy by Ultrahigh-Vacuum Chemical Vapor Deposition

1994 ◽  
Vol 33 (Part 1, No.1A) ◽  
pp. 240-246 ◽  
Author(s):  
Tz-Guei Jung ◽  
Chun-Yen Chang ◽  
Ting-Chang Chang ◽  
Horng-Chih Lin ◽  
Tom Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Silicon Germanium ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Germanium Alloy

Abruptness of Ge composition at the Si/SiGe interface grown by ultrahigh vacuum chemical vapor deposition

1995 ◽  
Vol 67 (8) ◽  
pp. 1092-1094 ◽  
Author(s):  
W. C. Tsai ◽  
C. Y. Chang ◽  
T. G. Jung ◽  
T. S. Liou ◽  
G. W. Huang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor

Ultrahigh Vacuum Chemical Vapor Deposition (UHVCVD)

2012 ◽  
pp. 2789-2789
Author(s):  
Suhas S. Joshi ◽  
Lesa A. Tran ◽  
Lon J. Wilson ◽  
Suhas S. Joshi
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor
Sign in / Sign up

Export Citation Format

Share Document