Studies on Design of Titanium Indiffused Lithium Niobate Integrated Optic Channel Waveguides and Directional Couplers

1998 ◽  
Vol 27 (3) ◽  
pp. 121-137
Author(s):  
K. R. Suresh Nair ◽  
Y. G. K. Patro ◽  
R. K. Shevgaonkar
Keyword(s):  
Lithium Niobate ◽  
Directional Couplers ◽  
Channel Waveguides

Fabrication and Characterisation of Reverse Proton Exchange Optical Waveguides in Neodymium Doped Lithium Niobate Crystals

2005 ◽  
Vol 480-481 ◽  
pp. 429-436
Author(s):  
M. Domenech ◽  
G. Lifante ◽  
F. Cussó ◽  
A. Parisi ◽  
A.C. Cino ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Optical Waveguides ◽  
Spectroscopic Properties ◽  
Proton Exchange ◽  
Fabrication Process ◽  
The Other ◽  
Ion Plating ◽  
Other Hand ◽  
Channel Waveguides ◽  
Lithium Niobate Crystals

In this work, the complete fabrication process which combines Proton Exchange (PE) and Reverse Proton Exchange (RPE) in Neodymium doped LiNbO3 channel waveguides is reported. To produce the PE-RPE channel waveguides the fabrication of dielectric SiO2 masks had to be implemented. For this propose, we adopted a technique based on the Ion Plating Plasma Assisted Deposition of SiO2 followed by the standard ultraviolet photolithographic patterning. On the other hand, we determined the main optical and spectroscopic properties of Nd3+ ions in the channel waveguides including the study of the lifetime as function as the polarisation.

Near field measurements of optical channel waveguides and directional couplers

1994 ◽  
Vol 65 (8) ◽  
pp. 947-949 ◽  
Author(s):  
Ahn Goo Choo ◽  
Howard E. Jackson ◽  
Udo Thiel ◽  
Gregory N. De Brabander ◽  
Joseph T. Boyd
Keyword(s):  
Near Field ◽  
Field Measurements ◽  
Optical Channel ◽  
Directional Couplers ◽  
Channel Waveguides

NANOSCALE ARRAYS IN LITHIUM NIOBATE FABRICATED BY INTERFERENCE LITHOGRAPHY AND DRY ETCHING

2010 ◽  
Vol 09 (04) ◽  
pp. 311-315
Author(s):  
G. Y. SI ◽  
A. J. DANNER ◽  
J. H. TENG ◽  
S. S. ANG ◽  
A. B. CHEW ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Inductively Coupled Plasma ◽  
Optical Constants ◽  
Etching Rate ◽  
Proton Exchange ◽  
Interference Lithography ◽  
Etching Depth ◽  
Inductively Coupled ◽  
Channel Waveguides ◽  
Total Etching

Channel waveguides have been fabricated in x-cut lithium niobate (LiNbO3) by proton exchange (PE) method and optically measured. The thickness and the optical constants of the thin PE layer were characterized using a prism coupling technique. The PE area was plasma etched and a 2.775-μm total etching depth was achieved. The measured average etching rate is 92.5 nm/min. One- and two-dimensional dense arrays of LiNbO3 nanostructures have also been fabricated by using interference lithography (IL) and inductively coupled plasma reactive ion etching (ICP-RIE) techniques.

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