Closed-loop identification of wafer temperature dynamics in a rapid thermal process

2006 ◽  
Vol 23 (2) ◽  
pp. 171-175 ◽  
Author(s):  
Wonhui Cho ◽  
Thomas F. Edgar ◽  
Jietae Lee
Keyword(s):  
Thermal Process ◽  
Closed Loop ◽  
Rapid Thermal Process ◽  
Wafer Temperature ◽  
Temperature Dynamics ◽  
Closed Loop Identification

Closed Loop Identification of a Steam Superheater

1979 ◽  
Vol 12 (8) ◽  
pp. 961-968
Author(s):  
J.A. de la Puente ◽  
P. Albertos
Keyword(s):  
Closed Loop ◽  
Steam Superheater ◽  
Closed Loop Identification

scholarly journals Software Sensor to Enhance Online Parametric Identification for Nonlinear Closed-Loop Systems for Robotic Applications

Sensors ◽  
2021 ◽  
Vol 21 (11) ◽  
pp. 3653
Author(s):  
Lilia Sidhom ◽  
Ines Chihi ◽  
Ernest Nlandu Kamavuako
Keyword(s):  
Degrees Of Freedom ◽  
Closed Loop ◽  
Sliding Mode ◽  
Robot Manipulator ◽  
Parametric Identification ◽  
Recursive Least Squares ◽  
Unknown Parameters ◽  
Closed Loop Identification ◽  
Input Variables ◽  
Robotic Applications

This paper proposes an online direct closed-loop identification method based on a new dynamic sliding mode technique for robotic applications. The estimated parameters are obtained by minimizing the prediction error with respect to the vector of unknown parameters. The estimation step requires knowledge of the actual input and output of the system, as well as the successive estimate of the output derivatives. Therefore, a special robust differentiator based on higher-order sliding modes with a dynamic gain is defined. A proof of convergence is given for the robust differentiator. The dynamic parameters are estimated using the recursive least squares algorithm by the solution of a system model that is obtained from sampled positions along the closed-loop trajectory. An experimental validation is given for a 2 Degrees Of Freedom (2-DOF) robot manipulator, where direct and cross-validations are carried out. A comparative analysis is detailed to evaluate the algorithm’s effectiveness and reliability. Its performance is demonstrated by a better-quality torque prediction compared to other differentiators recently proposed in the literature. The experimental results highlight that the differentiator design strongly influences the online parametric identification and, thus, the prediction of system input variables.

Nitrogen-doped Czochralski silicon treated in rapid thermal process

2006 ◽  
Vol 134 (2-3) ◽  
pp. 193-201 ◽  
Author(s):  
Deren Yang ◽  
Ming Li ◽  
Can Cui ◽  
Xiangyang Ma ◽  
Duanlin Que
Keyword(s):  
Thermal Process ◽  
Rapid Thermal Process ◽  
Nitrogen Doped ◽  
Czochralski Silicon

scholarly journals Closed-Loop Identification of Hammerstein Systems with Application to Gas Turbines

2014 ◽  
Vol 47 (3) ◽  
pp. 493-498 ◽  
Author(s):  
Chad M. Holcomb ◽  
Raymond A. de Callafon ◽  
Robert R. Bitmead
Keyword(s):  
Gas Turbines ◽  
Closed Loop ◽  
Hammerstein Systems ◽  
Closed Loop Identification

scholarly journals Closed Loop Identification of a Remotely Operated Flight Vehicle

2004 ◽  
Vol 37 (14) ◽  
pp. 163-168
Author(s):  
Meihong Wang ◽  
Robert Sutton ◽  
John Chudley
Keyword(s):  
Closed Loop ◽  
Flight Vehicle ◽  
Closed Loop Identification

scholarly journals MPC closed-loop identification without excitation

2020 ◽  
Vol 53 (2) ◽  
pp. 895-900
Author(s):  
Yun Zhu ◽  
Wengang Yan ◽  
Yucai Zhu
Keyword(s):  
Closed Loop ◽  
Closed Loop Identification
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