Extended defects in hydrogen-implanted (111) silicon wafer treated by high temperature annealing process
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2006 ◽
Vol 527-529
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pp. 915-918
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2000 ◽
Vol 51-52
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pp. 575-581
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2017 ◽
Vol 26
(11)
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pp. 5432-5438
2013 ◽
Vol 16
(3)
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pp. 923-927
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