Electrical properties of silicon dioxide films fabricated at 700°C. I: Pyroltsis of tetraethoxysilane

1985 ◽  
Vol 14 (3) ◽  
pp. 329-342 ◽  
Author(s):  
R. H. Vogel ◽  
S. R. Butler ◽  
F. J. Feigl
Keyword(s):  
Electrical Properties ◽  
Silicon Dioxide ◽  
Silicon Dioxide Films

The electrical properties of anodically grown silicon dioxide films

1973 ◽  
Vol 16 (3) ◽  
pp. 309-314 ◽  
Author(s):  
J.D.E. Beynon ◽  
G.G. Bloodworth ◽  
I.M. McLeod
Keyword(s):  
Electrical Properties ◽  
Silicon Dioxide ◽  
Silicon Dioxide Films

ChemInform Abstract: Electrical Properties of Silicon Dioxide Films Fabricated at 700 ° C.

1986 ◽  
Vol 17 (11) ◽  
Author(s):  
L. P. TROMBETTA ◽  
R. J. ZETO ◽  
F. J. FEIGL ◽  
M. E. ZVANUT
Keyword(s):  
Electrical Properties ◽  
Silicon Dioxide ◽  
Silicon Dioxide Films

Electrical properties of silicon dioxide films fabricated at 700°C. II: Low pressure hydride deposition

1985 ◽  
Vol 14 (3) ◽  
pp. 343-366 ◽  
Author(s):  
M. E. Zvanut ◽  
F. J. Feigl ◽  
S. R. Butler ◽  
S. L. Titcomb
Keyword(s):  
Electrical Properties ◽  
Silicon Dioxide ◽  
Low Pressure ◽  
Silicon Dioxide Films
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