Formation mechanism of InxGa1−xAs ohmic contacts to n-type GaAs prepared by radio frequency sputtering

Chihiro J. Uchibori; Masayuki Okunishi; T. Oku; A. Otsuki; Naoki Ono; Masanori Murakami

doi:10.1007/bf02655374

Formation mechanism of InxGa1−xAs ohmic contacts to n-type GaAs prepared by radio frequency sputtering

Journal of Electronic Materials ◽

10.1007/bf02655374 ◽

1994 ◽

Vol 23 (9) ◽

pp. 983-989 ◽

Cited By ~ 6

Author(s):

Chihiro J. Uchibori ◽

Masayuki Okunishi ◽

T. Oku ◽

A. Otsuki ◽

Naoki Ono ◽

...

Keyword(s):

Radio Frequency ◽

Formation Mechanism ◽

Ohmic Contacts ◽

Radio Frequency Sputtering

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Development of InxGa1−xAs-based ohmic contacts for p-type GaAs by radio-frequency sputtering

Journal of Electronic Materials ◽

10.1007/s11664-998-0151-y ◽

1998 ◽

Vol 27 (10) ◽

pp. L64-L67 ◽

Cited By ~ 2

Author(s):

Mitsumasa Ogura ◽

Masanori Murakami

Keyword(s):

Radio Frequency ◽

Ohmic Contacts ◽

Radio Frequency Sputtering ◽

P Type

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InxGa1 − xAs-based Ohmic contacts to n-type GaAs with W-nitride barrier prepared by radio frequency sputtering

Applied Surface Science ◽

10.1016/s0169-4332(97)80106-7 ◽

1997 ◽

Vol 117-118 ◽

pp. 347-351 ◽

Cited By ~ 2

Author(s):

C.J. Uchibori ◽

Y. Ohtani ◽

T. Oku ◽

N. Ono ◽

M. Murakami

Keyword(s):

Radio Frequency ◽

Ohmic Contacts ◽

Radio Frequency Sputtering

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Au/Ti/p-Diamond Ohmic Contacts Prepared by Radio-Frequency Sputtering

Chinese Physics Letters ◽

10.1088/0256-307x/17/11/017 ◽

2000 ◽

Vol 17 (11) ◽

pp. 827-828 ◽

Cited By ~ 3

Author(s):

Zhen Cong-Mian ◽

Liu Xue-Qin ◽

Yan Zhi-Jun ◽

Gong Heng-Xiang ◽

Wang Yin-Yue

Keyword(s):

Radio Frequency ◽

Ohmic Contacts ◽

Radio Frequency Sputtering

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Thermoelectric properties of Al1−xInxN and Al1−y−zGayInzN prepared by radio-frequency sputtering: Toward a thermoelectric power device

Applied Physics Letters ◽

10.1063/1.1560560 ◽

2003 ◽

Vol 82 (13) ◽

pp. 2065-2067 ◽

Cited By ~ 38

Author(s):

Shigeo Yamaguchi ◽

Yasuo Iwamura ◽

Atsushi Yamamoto

Keyword(s):

Radio Frequency ◽

Thermoelectric Power ◽

Thermoelectric Properties ◽

Power Device ◽

Radio Frequency Sputtering

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Radio frequency sputtering—the significance of power input

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.572218 ◽

1983 ◽

Vol 1 (4) ◽

pp. 1795-1800 ◽

Cited By ~ 41

Author(s):

Chris M. Horwitz

Keyword(s):

Radio Frequency ◽

Power Input ◽

Radio Frequency Sputtering

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Magnetron radio frequency sputtering growth of LaNi5 thin films and their hydrogen-sensitive properties at room temperature and ordinary pressure

Applied Surface Science ◽

10.1016/j.apsusc.2015.01.051 ◽

2015 ◽

Vol 331 ◽

pp. 35-40 ◽

Cited By ~ 3

Author(s):

Han Tian ◽

Kansong Chen ◽

Huarong Liu ◽

Kun Xie ◽

Haoshuang Gu

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Room Temperature ◽

Radio Frequency Sputtering

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Annealing Effects on Cathodoluminescence Properties of SiOxFilms Deposited by Radio Frequency Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.01bf04 ◽

2011 ◽

Vol 50 ◽

pp. 01BF04 ◽

Cited By ~ 1

Author(s):

Ahmed Mohamed Ahmed Abd El-Razek Shamekh ◽

Norio Tokuda ◽

Takao Inokuma

Keyword(s):

Radio Frequency ◽

Radio Frequency Sputtering ◽

Annealing Effects

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Specific features of the formation of Ba x Sr1 − x TiO3 ferroelectric thin films on different substrates by radio-frequency sputtering

Physics of the Solid State ◽

10.1134/s1063783409070026 ◽

2009 ◽

Vol 51 (7) ◽

pp. 1328-1331 ◽

Cited By ~ 11

Author(s):

M. S. Ivanov ◽

M. S. Afanas’ev

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Ferroelectric Thin Films ◽

Radio Frequency Sputtering

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Influence of the Composition of the Radio-Frequency Sputtering Atmosphere on the Density of States and Interband Light Absorption in thin Y2O3 Films

Journal of Applied Spectroscopy ◽

10.1007/s10812-022-01292-x ◽

2022 ◽

Author(s):

O. M. Bordun ◽

B. O. Bordun ◽

I. M. Kofliuk ◽

I. Yo. Kukharskyy ◽

I. I. Medvid

Keyword(s):

Radio Frequency ◽

Density Of States ◽

Light Absorption ◽

Radio Frequency Sputtering ◽

Interband Light Absorption

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Fabrication of Blue-Light Emitting Tantalum Oxide Films by Radio-Frequency Sputtering

2008 IEEE PhotonicsGlobal@Singapore ◽

10.1109/ipgc.2008.4781359 ◽

2008 ◽

Author(s):

K. Miura ◽

H. Miyazaki ◽

O. Hanaizumi

Keyword(s):

Radio Frequency ◽

Blue Light ◽

Tantalum Oxide ◽

Oxide Films ◽

Light Emitting ◽

Radio Frequency Sputtering

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