Radio frequency sputtering—the significance of power input

Chris M. Horwitz

doi:10.1116/1.572218

Radio frequency sputtering—the significance of power input

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.572218 ◽

1983 ◽

Vol 1 (4) ◽

pp. 1795-1800 ◽

Cited By ~ 41

Author(s):

Chris M. Horwitz

Keyword(s):

Radio Frequency ◽

Power Input ◽

Radio Frequency Sputtering

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Thermoelectric properties of Al1−xInxN and Al1−y−zGayInzN prepared by radio-frequency sputtering: Toward a thermoelectric power device

Applied Physics Letters ◽

10.1063/1.1560560 ◽

2003 ◽

Vol 82 (13) ◽

pp. 2065-2067 ◽

Cited By ~ 38

Author(s):

Shigeo Yamaguchi ◽

Yasuo Iwamura ◽

Atsushi Yamamoto

Keyword(s):

Radio Frequency ◽

Thermoelectric Power ◽

Thermoelectric Properties ◽

Power Device ◽

Radio Frequency Sputtering

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Magnetron radio frequency sputtering growth of LaNi5 thin films and their hydrogen-sensitive properties at room temperature and ordinary pressure

Applied Surface Science ◽

10.1016/j.apsusc.2015.01.051 ◽

2015 ◽

Vol 331 ◽

pp. 35-40 ◽

Cited By ~ 3

Author(s):

Han Tian ◽

Kansong Chen ◽

Huarong Liu ◽

Kun Xie ◽

Haoshuang Gu

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Room Temperature ◽

Radio Frequency Sputtering

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Annealing Effects on Cathodoluminescence Properties of SiOxFilms Deposited by Radio Frequency Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.01bf04 ◽

2011 ◽

Vol 50 ◽

pp. 01BF04 ◽

Cited By ~ 1

Author(s):

Ahmed Mohamed Ahmed Abd El-Razek Shamekh ◽

Norio Tokuda ◽

Takao Inokuma

Keyword(s):

Radio Frequency ◽

Radio Frequency Sputtering ◽

Annealing Effects

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Specific features of the formation of Ba x Sr1 − x TiO3 ferroelectric thin films on different substrates by radio-frequency sputtering

Physics of the Solid State ◽

10.1134/s1063783409070026 ◽

2009 ◽

Vol 51 (7) ◽

pp. 1328-1331 ◽

Cited By ~ 11

Author(s):

M. S. Ivanov ◽

M. S. Afanas’ev

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Ferroelectric Thin Films ◽

Radio Frequency Sputtering

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Influence of the Composition of the Radio-Frequency Sputtering Atmosphere on the Density of States and Interband Light Absorption in thin Y2O3 Films

Journal of Applied Spectroscopy ◽

10.1007/s10812-022-01292-x ◽

2022 ◽

Author(s):

O. M. Bordun ◽

B. O. Bordun ◽

I. M. Kofliuk ◽

I. Yo. Kukharskyy ◽

I. I. Medvid

Keyword(s):

Radio Frequency ◽

Density Of States ◽

Light Absorption ◽

Radio Frequency Sputtering ◽

Interband Light Absorption

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Fabrication of Blue-Light Emitting Tantalum Oxide Films by Radio-Frequency Sputtering

2008 IEEE PhotonicsGlobal@Singapore ◽

10.1109/ipgc.2008.4781359 ◽

2008 ◽

Author(s):

K. Miura ◽

H. Miyazaki ◽

O. Hanaizumi

Keyword(s):

Radio Frequency ◽

Blue Light ◽

Tantalum Oxide ◽

Oxide Films ◽

Light Emitting ◽

Radio Frequency Sputtering

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Radio frequency sputtering of ferrimagnetic thin films

Czechoslovak Journal of Physics ◽

10.1007/bf01691555 ◽

1971 ◽

Vol 21 (4-5) ◽

pp. 558-562 ◽

Cited By ~ 1

Author(s):

R. Metselaar ◽

P. Rem

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Radio Frequency Sputtering

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Detailed investigation of the influence of the process parameters on the nano-morphology of Ag deposited on SiC by radio-frequency sputtering

Journal of Applied Physics ◽

10.1063/1.3626072 ◽

2011 ◽

Vol 110 (4) ◽

pp. 044311 ◽

Cited By ~ 7

Author(s):

F. Ruffino ◽

M. G. Grimaldi

Keyword(s):

Radio Frequency ◽

Process Parameters ◽

Radio Frequency Sputtering

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Preparation of cubic boron nitride films by radio frequency sputtering

Acta Physica Sinica ◽

10.7498/aps.55.5441 ◽

2006 ◽

Vol 55 (10) ◽

pp. 5441

Author(s):

Tian Ling ◽

Ding Yi ◽

Chen Hao ◽

Liu Jun-Kai ◽

Deng Jin-Xiang ◽

...

Keyword(s):

Boron Nitride ◽

Radio Frequency ◽

Cubic Boron Nitride ◽

Radio Frequency Sputtering ◽

Boron Nitride Films

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Electrical and Optical Properties of Asymmetric Dielectric/Metal/Dielectric (D/M/D) Multilayer Electrode Prepared by Radio-Frequency Sputtering for Solar Cells

Journal of Sensor Science and Technology ◽

10.5369/jsst.2015.24.1.15 ◽

2015 ◽

Vol 24 (1) ◽

pp. 15-21

Author(s):

Rina Pandey ◽

Ju Won Lim ◽

Keun Yong Lim ◽

Do Kyung Hwang ◽

Won Kook Choi

Keyword(s):

Optical Properties ◽

Solar Cells ◽

Radio Frequency ◽

Electrical And Optical Properties ◽

Radio Frequency Sputtering ◽

Multilayer Electrode

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