Selective photochemical etching by enhanced carrier recombination: Process control using Raman spectroscopy

1991 ◽  
Vol 20 (9) ◽  
pp. 695-699 ◽  
Author(s):  
C. I. H. Ashby ◽  
D. R. Myers
1990 ◽  
Vol 201 ◽  
Author(s):  
C. I. H. Ashby ◽  
D. R. Myers ◽  
G. A. Vawter ◽  
R. M. Biefeld ◽  
J. F. Klem

AbstractCarrier-driven photochemical etching of semiconductors can be selectively suppressed by altering the near-surface region to enhance carrier recombination, thereby reducing the supply of carriers that drive the surface etching reaction. Two methods for enhancing recombination and decreasing the etch rate at a given phonon flux include ion implantation and localized Zn diffusion. Raman spectroscopy can be employed to determine whether sufficient alteration of electronic properties has occurred to suppress etching.Carrier-driven photochemical reactions, which require direct participation of free carriers for the chemical reaction to proceed, can be selectively suppressed by increasing the minority carrier recombination rate, thereby reducing the supply of carriers that drive the surface etching reaction. Two methods for enhancing recombination and decreasing the etching quantum yield, which is the number of atoms removed per incident photon, include ion implantation and localized Zn diffusion. For ion implantation, recombination-promoting defect concentrations depend on ion species, fluence, and annealing both during and after the implantation process. Other recombination processes related to carrier scattering from ionized impurities from in-diffusion of dopants or following implant activation can control etching.Raman spectroscopy can be employed to detect changes in electronic properties that correlate with etching suppression. Changes that occur in the LO-phonon lineshape, such as those associated with phonon confinement and ionized impurity scattering, can be diagnostic of the carrier-driven etching behavior following a specific treatment. We have demonstrated two applications of Raman spectroscopy as a diagnostic for suppression of the carrier-driven photochemical etching of GaAs.


2001 ◽  
Vol 55 (9) ◽  
pp. 1138-1150 ◽  
Author(s):  
Ian M. Clegg ◽  
Neil J. Everall ◽  
Bert King ◽  
Hugh Melvin ◽  
Colin Norton

ACS Sensors ◽  
2020 ◽  
Vol 5 (8) ◽  
pp. 2467-2475
Author(s):  
Amanda M. Lines ◽  
Gabriel B. Hall ◽  
Susan Asmussen ◽  
Jarrod Allred ◽  
Sergey Sinkov ◽  
...  

2010 ◽  
Vol 108 (9) ◽  
pp. 099902
Author(s):  
Zhiyan Xiao ◽  
Hiroaki Matsui ◽  
Kouichi Katayama ◽  
Kensuke Miyajima ◽  
Tadashi Itoh ◽  
...  

2010 ◽  
Vol 108 (1) ◽  
pp. 013502 ◽  
Author(s):  
Zhiyan Xiao ◽  
Hiroaki Matsui ◽  
Kouichi Katayama ◽  
Kensuke Miyajima ◽  
Tadashi Itoh ◽  
...  

2020 ◽  
Vol 4 (3) ◽  
pp. 45 ◽  
Author(s):  
Jasmin Reiner ◽  
Kristin Protte ◽  
Jörg Hinrichs

Online detection of product defects using fast spectroscopic measurements is beneficial for producers in the dairy industry since it allows readjustment of product characteristics or redirection of product streams during production. Raman spectroscopy has great potential for such application due to the fast and simple measurement. Its suitability as online sensor for process control was investigated at typical control points in consumer milk production being raw milk storage, standardization, and heat treatment. Additionally, the appropriateness of Raman spectroscopy to act as indicator for product application parameters was investigated using the example of barista foam. To assess the suitability of a pure online system, the merit of Raman spectra was evaluated by a principal component analysis (PCA). Thereby, proteolytic spoilage due to the presence of extracellular enzymes of Pseudomonas sp. was detected and samples based on the applied heat treatment (extended shelf life (ESL) and ultra-high temperature (UHT)) could be separated. A correlation of the content of free fatty acids and foam stability with spectra of the respective milk samples was found, allowing a prediction of the technofunctional quality criterion “Barista” suitability of a UHT milk. The results underlined the suitability of Raman spectroscopy for the detection of deviations from a defined product standard of consumer milk.


Author(s):  
Kosuke O. Hara ◽  
Noritaka Usami ◽  
Katsuaki Toh ◽  
Masakazu Baba ◽  
Kaoru Toko ◽  
...  

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