Real-time control of HgCdTe growth by organometallic vapor phase epitaxy using spectroscopic ellipsometry

1995 ◽  
Vol 24 (9) ◽  
pp. 1087-1091 ◽  
Author(s):  
Srikanteswara Dakshina Murthy ◽  
Ishwara Bhat ◽  
Blaine Johs ◽  
Shakil Pittal ◽  
Ping He
Keyword(s):  
Real Time ◽  
Vapor Phase ◽  
Spectroscopic Ellipsometry ◽  
Vapor Phase Epitaxy ◽  
Organometallic Vapor Phase Epitaxy ◽  
Real Time Control ◽  
Time Control

Application of spectroscopic ellipsometry for real-time control of CdTe and HgCdTe growth in an OMCVD system

1995 ◽  
Vol 24 (5) ◽  
pp. 445-449 ◽  
Author(s):  
S. Dakshina Murthy ◽  
I. B. Bhat ◽  
B. Johs ◽  
S. Pittal ◽  
P. He
Keyword(s):  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Real Time Control ◽  
Time Control

In-Situ Spectroscopic Ellipsometry Applied to ZnSe and ZnCdSe Growth Process in Organometallic Vapor Phase Epitaxy

1992 ◽  
Vol 242 ◽  
Author(s):  
J. Iacoponi ◽  
L. B. Bhat ◽  
B. Johs ◽  
J.A. Woollam
Keyword(s):  
Film Thickness ◽  
Gas Phase ◽  
Vapor Phase ◽  
Spectroscopic Ellipsometry ◽  
Growth Process ◽  
Vapor Phase Epitaxy ◽  
In Situ Monitoring ◽  
Semiconductor Materials ◽  
Organometallic Vapor Phase Epitaxy

ABSTRACTSpectroscopie ellipsometry is a well developed technique for studying the semiconductor materials and heterostructures. Here, we have applied this technique to in-situ studies of ZnSe and ZnCdSe growth in a low pressure organometallic vapor phase epitaxy system. The growth of ZnSe on GaAs was studied using a light source in the range 2 to 4 eV, and film thickness of a few tens of angstroms could be monitored by this technique. The band gap and the composition of Zn1-χCdχSe could also be measured as a function of real time. It was found that, for a gas phase DMCd composition of 60%, the amount of Cd incorporated in the layers is less than 25%. Spectroscopie ellipsometry is demonstrated to be a valuable technique for in-situ monitoring of semiconductor growth in organometallic vapor phase epitaxy systems.

A Real Time Control Architecture for Continuously Managing Patients in a Care Unit

1995 ◽  
Vol 34 (05) ◽  
pp. 475-488
Author(s):  
B. Seroussi ◽  
J. F. Boisvieux ◽  
V. Morice
Keyword(s):  
Real Time ◽  
Linear Time ◽  
Treatment Plan ◽  
Control Architecture ◽  
Real Time Control ◽  
Time Representation ◽  
Time Control ◽  
Continuous Support ◽  
Definition Of ◽  
Computerized System

Abstract:The monitoring and treatment of patients in a care unit is a complex task in which even the most experienced clinicians can make errors. A hemato-oncology department in which patients undergo chemotherapy asked for a computerized system able to provide intelligent and continuous support in this task. One issue in building such a system is the definition of a control architecture able to manage, in real time, a treatment plan containing prescriptions and protocols in which temporal constraints are expressed in various ways, that is, which supervises the treatment, including controlling the timely execution of prescriptions and suggesting modifications to the plan according to the patient’s evolving condition. The system to solve these issues, called SEPIA, has to manage the dynamic, processes involved in patient care. Its role is to generate, in real time, commands for the patient’s care (execution of tests, administration of drugs) from a plan, and to monitor the patient’s state so that it may propose actions updating the plan. The necessity of an explicit time representation is shown. We propose using a linear time structure towards the past, with precise and absolute dates, open towards the future, and with imprecise and relative dates. Temporal relative scales are introduced to facilitate knowledge representation and access.

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