Interface reactions between titanium thin films and (1¯1 2) sapphire substrates

1991 ◽  
Vol 26 (23) ◽  
pp. 6300-6308 ◽  
Author(s):  
J. H. Selverian ◽  
F. S. Ohuchi ◽  
M. Bortz ◽  
M. R. Notis
Keyword(s):  
Thin Films ◽  
Interface Reactions ◽  
Sapphire Substrates ◽  
Titanium Thin Films

Growth of Ti thin films on sapphire substrates

1997 ◽  
Vol 12 (7) ◽  
pp. 1856-1865 ◽  
Author(s):  
S. Rao Peddada ◽  
I. M. Robertson ◽  
H. K. Birnbaum
Keyword(s):  
Thin Films ◽  
Physical Vapor Deposition ◽  
Single Phase ◽  
Epitaxial Relationship ◽  
X Ray ◽  
Sapphire Substrates ◽  
Titanium Thin Films ◽  
Sapphire Single Crystal ◽  
20 Nm ◽  
Ti Films

Titanium thin films have been grown by electron-beam physical vapor deposition on the (0001) surface of sapphire (single crystal α−Al2O3) substrates at growth temperatures ranging from 295 to 1223 K. Single phase α−Ti films grew at all growth temperatures, even at 1223 K which is above the α-β transition temperature of Ti. Crystal quality, as measured by the width of x-ray rocking curves, was found to improve, and the elastic strain to increase, as the growth temperature increased from 295 K to 1023 K. The epitaxial relationship between the Ti and sapphire was (0002)Ti ‖ (0006)Al2O3 and [1120]Ti ‖ [1010]Al2O3. The extent of interdiffusion across the Ti/Al2O3 interface was observed to be small (< 20 nm) at all growth temperatures.

A study of titanium thin films in transmission laser micro-joining of titanium-coated glass to polyimide

2010 ◽  
Vol 518 (10) ◽  
pp. 2632-2636 ◽  
Author(s):  
Taslema Sultana ◽  
Golam Newaz ◽  
Grigor L. Georgiev ◽  
Ronald J. Baird ◽  
Gregory W. Auner ◽  
...  
Keyword(s):  
Thin Films ◽  
Coated Glass ◽  
Titanium Thin Films

Properties of Nb3Al Thin Films Sputter-Deposited on Sapphire Substrates

1982 ◽  
Vol 21 (Part 1, No. 10) ◽  
pp. 1427-1430 ◽  
Author(s):  
Keiichi Tanabe ◽  
Osamu Michikami
Keyword(s):  
Thin Films ◽  
Sapphire Substrates ◽  
Sputter Deposited

Heteroepitaxy, polymorphism, and faulting in GaN thin films on silicon and sapphire substrates

1993 ◽  
Vol 74 (7) ◽  
pp. 4430-4437 ◽  
Author(s):  
T. Lei ◽  
K. F. Ludwig ◽  
T. D. Moustakas
Keyword(s):  
Thin Films ◽  
Sapphire Substrates

Growth of corundum-structured In2O3 thin films on sapphire substrates with Fe2O3 buffer layers

2013 ◽  
Vol 364 ◽  
pp. 30-33 ◽  
Author(s):  
Norihiro Suzuki ◽  
Kentaro Kaneko ◽  
Shizuo Fujita
Keyword(s):  
Thin Films ◽  
Buffer Layers ◽  
Sapphire Substrates

Structural properties of the epitaxial CuCr0.95Mg0.05O2 thin films on c-plane sapphire substrates by pulsed laser deposition

2011 ◽  
Vol 326 (1) ◽  
pp. 9-13 ◽  
Author(s):  
Se-Yun Kim ◽  
Sang-Yun Sung ◽  
Kwang-Min Jo ◽  
Joon-Hyung Lee ◽  
Jeong-Joo Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Structural Properties ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Sapphire Substrates
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