The negative role of the fast electrons in the microwave oxidation of silicon
1978 ◽
Vol 28
(6)
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pp. 639-643
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Keyword(s):
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2001 ◽
Vol 174
(1-2)
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pp. 81-87
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Keyword(s):
Keyword(s):
2019 ◽
Vol 20
(20)
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pp. 5226
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2009 ◽
Vol 284
(37)
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pp. 25149-25159
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