A complex of spectrochemical, mass-spectrometric and atomic-absorption methods for the analysis of thin layers of gallium arsenide and silicon semiconductors

1978 ◽  
Vol 69 (5-6) ◽  
pp. 547-556 ◽  
Author(s):  
I. G. Yudelevich ◽  
I. P. Shelpakova
1998 ◽  
Vol 13 (9) ◽  
pp. 983-987 ◽  
Author(s):  
Johanna Sabine Becker ◽  
Rajiv S. Soman ◽  
Thomas Becker ◽  
Vijay K. Panday ◽  
Hans-joachim Dietze

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