Radiofrequency spark source mass spectrometric analysis of oxygen in undoped silicon crystals and of carbon in undoped and carbon doped gallium arsenide crystals

1994 ◽  
Vol 350 (4-5) ◽  
pp. 319-322 ◽  
Author(s):  
B. Wiedemann ◽  
K. Bethge ◽  
W. Sch�tze ◽  
U. Lambert ◽  
S. Pahlke ◽  
...  
Sign in / Sign up

Export Citation Format

Share Document