Fire protection of flammable work stations in the clean room environment of a microelectronic fabrication facility

1986 ◽  
Vol 22 (2) ◽  
pp. 148-165 ◽  
Author(s):  
Fred L. Fisher ◽  
Robert Brady Williamson ◽  
Gary L. Toms ◽  
Dennis M. Crinnion
Keyword(s):  
Fire Protection ◽  
Clean Room ◽  
Microelectronic Fabrication ◽  
Clean Room Environment

Atomic scale fabrication of dangling bond structures on hydrogen passivated Si(001) wafers processed and nanopackaged in a clean room environment

2014 ◽  
Vol 288 ◽  
pp. 83-89 ◽  
Author(s):  
Marek Kolmer ◽  
Szymon Godlewski ◽  
Rafal Zuzak ◽  
Mateusz Wojtaszek ◽  
Caroline Rauer ◽  
...  
Keyword(s):  
Atomic Scale ◽  
Dangling Bond ◽  
Clean Room ◽  
Clean Room Environment

Clean Room Considerations for Avoiding Molecular Contamination

1985 ◽  
Vol 28 (5) ◽  
pp. 21-22
Author(s):  
Martin McClellan
Keyword(s):  
Lessons Learned ◽  
Ultraviolet Spectrum ◽  
Clean Room ◽  
Screening Process ◽  
Handling System ◽  
Control Functions ◽  
Industry Standard ◽  
Standard Practices ◽  
Potential Contaminant ◽  
Clean Room Environment

Control of contamination for optical products, especially those operating in the ultraviolet spectrum, is examined from three perspectives: materials involved, personnel controls, and environmental conditions. These control functions assume even greater significance when large clean room facilities are required for complex aerospace assemblies, and many clean room products or industry standard practices are not necessarily applicable. Every material introduced into a clean room environment is a potential contaminant, and must be reviewed as part of the operational screening process. Plastics commonly used in the design of clean room products can sometimes outgas and thus degrade optical performance. Facilities rework modifications, local or remote, can introduce contaminants into the air handling system which could produce deleterious effects on critical hardware. Lessons learned and the solutions that have been developed at Perkin-Elmer are discussed in several key areas: modular clean room procurement, verification of HEPA filters, clean room maintenance, design and operational certification and materials controls.

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