Study of low-frequency oscillations in a glow discharge from a cylindrical hollow cathode

1987 ◽  
Vol 30 (4) ◽  
pp. 412-416
Author(s):  
O. S. Shcheglov ◽  
F. G. Zvereva ◽  
L. G. Netsenko
Keyword(s):  
Glow Discharge ◽  
Hollow Cathode ◽  
Low Frequency ◽  
Low Frequency Oscillations ◽  
Cylindrical Hollow Cathode

Effective Sputtering System for Deposition of Wear-Resistant and Anticorrosion Coatings

2015 ◽  
Vol 834 ◽  
pp. 61-70
Author(s):  
Aleksander Sergeevich Metel ◽  
Sergey Nikolaevich Grigoriev ◽  
Vasilii Petrovich Bolbukov ◽  
Yury Andreevich Melnik
Keyword(s):  
Magnetic Field ◽  
Glow Discharge ◽  
Hollow Cathode ◽  
Magnetic Induction ◽  
Anticorrosion Coatings ◽  
Field Lines ◽  
The Magnetic Field ◽  
Target Center ◽  
Cylindrical Hollow Cathode ◽  
Sputtering System

Results of a target sputtering investigation have been obtained, the target being positioned on the bottom of a cylindrical hollow cathode covered by a grid. It was shown that influence on the glow discharge of a nonuniform magnetic field with lines crossing the target center as well as the grid, the hollow cathode and the target periphery, where the field lines are arc-shaped, depends on the magnetic induction on the target edge. Due to ionization by electrons emitted by the cathode and forced by the magnetic field to approach to the target more frequently the plasma density near the target grows up and more than a half of all ions produced in the discharge quite uniformly sputter the target

TEMPERATURE OF HEAVY-CURRENT CYLINDRICAL HOLLOW CATHODE

1979 ◽  
Vol 40 (C7) ◽  
pp. C7-229-C7-230
Author(s):  
N. N. Rykalin ◽  
A. V. Nikolaev ◽  
A. P. Borzhov
Keyword(s):  
Hollow Cathode ◽  
Cylindrical Hollow Cathode

Comparison of plasma characteristics of high-power pulsed sputtering glow discharge and hollow-cathode discharge

2020 ◽  
Vol 60 (1) ◽  
pp. 015501
Author(s):  
Shoki Abe ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
Ken Yukimura
Keyword(s):  
Glow Discharge ◽  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Plasma Characteristics
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