Structure and properties of epitaxial layers of InxGa1?xAs grown from the gas phase

1992 ◽  
Vol 35 (2) ◽  
pp. 136-139
Author(s):  
M. D. Vilisova ◽  
I. A. Bobrovnikova ◽  
I. V. Teterkina ◽  
N. A. Chernov ◽  
M. P. Yakubenya
1989 ◽  
Vol 54 (11) ◽  
pp. 2933-2950
Author(s):  
Emerich Erdös ◽  
Petr Voňka ◽  
Josef Stejskal ◽  
Přemysl Klíma

This paper represents a continuation and ending of the kinetic study of the gallium arsenide formation, where a so-called inhomogeneous model is proposed and quantitatively formulated in five variants, in which two kinds of active centres appear. This model is compared both with the experimental data and with the previous sequence of homogeneous models.


1990 ◽  
Vol 52 (1) ◽  
pp. 93-96
Author(s):  
V. A. Bykovskii ◽  
S. A. Manego ◽  
V. I. Osinskii

2020 ◽  
Vol 25 (6) ◽  
pp. 483-396
Author(s):  
A.V. Afanasev ◽  
◽  
V.A. Ilyin ◽  
V.V. Luchinin ◽  
S.A. Reshanov ◽  
...  

Currently, chemical gas deposition is the main method for producing high-quality and reproducible epitaxial layers for commercial silicon carbide (SiC) power devices. Based on the experience of ETU «LETI» in the synthesis of monocrystalline SiC, an analysis of the current state of silicon carbide gas phase epitaxy (CVD) technology was carried out. It has been shown that modern CVD reactors allow to implement the growth processes of SiC epitaxial structures of high quality with the following parameters: substrates diameter up to 200 mm; thicknesses of epitaxial layers from 0.1 to 250 μm; layers of n - and p -types conductivity with ranges of doping levels 10-10 cm and 10-10 cm, respectively. At the same time, setting up the technology of the reproducible high-quality growth of epitaxial layers is an individual task for a specific type of reactor. It requires a detailed consideration of the technological factors presented in this paper, which at the end determine the achievable parameters of SiC-epitaxial products


2017 ◽  
Vol 19 (36) ◽  
pp. 25080-25085 ◽  
Author(s):  
John C. Mullaney ◽  
Chris Medcraft ◽  
David P. Tew ◽  
Luke Lewis-Borrell ◽  
Bernard T. Golding ◽  
...  

The structure and properties of a gas phase complex formed between urea and isocyanic acid are characterised through microwave spectroscopy andab initiocalculations at the CCSD(T)(F12*)/aug-cc-pVTZ level.


1976 ◽  
Vol 7 (5) ◽  
pp. no-no
Author(s):  
V. G. SAVITSKII ◽  
L. I. ALEKSEENKO ◽  
A. K. FILATOVA ◽  
I. S. SLABKOVSKII

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