Solid-solute phase equilibria: From thermodynamic basis information to multicomponent systems

1993 ◽  
Vol 55 (4) ◽  
pp. 314-323
Author(s):  
Heinz Gamsj�ger
Keyword(s):  
Phase Equilibria ◽  
Multicomponent Systems ◽  
Thermodynamic Basis

Analysis of the phase equilibria in multicomponent systems using graphs

1999 ◽  
Vol 9 (2) ◽  
pp. 56-59 ◽  
Author(s):  
Evgenii M. Slyusarenko ◽  
Mikhail V. Sofin ◽  
Elshat Yu. Kerimov
Keyword(s):  
Phase Equilibria ◽  
Multicomponent Systems

Quaternary Phase Equilibria in the Ti-Si-N-O System: Stability of Metallization Layers and Prediction of Thin Film Reactions

1989 ◽  
Vol 148 ◽  
Author(s):  
A.S. Bhansali ◽  
R. Sinclair
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Phase Diagram ◽  
Phase Equilibria ◽  
System Stability ◽  
Multicomponent Systems ◽  
Phase Rule ◽  
Quaternary Phase ◽  
Circuit Fabrication ◽  
Quaternary Phase Equilibria

ABSTRACTDuring high temperature circuit fabrication, metallization layers can come in contact with both solids and gases. Their stability can be addressed with the aid of phase equilibria. Using the Gibbs phase rule as a basis, a method for generating phase diagrams for multicomponent systems can be established. This procedure is described and illustrated by reference to the quaternary phase diagram of Ti-Si-N-O. This phase diagram can then be used to predict stability and/or reactions in metallization layers and thin films.

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