Making microcircuit-style thin-film resistance thermometers

P. I. Susol; I. D. Nabitovich; V. I. Lakh; Ya. V. Boris

doi:10.1007/bf00866820

Making microcircuit-style thin-film resistance thermometers

Measurement Techniques ◽

10.1007/bf00866820 ◽

1990 ◽

Vol 33 (1) ◽

pp. 57-59 ◽

Cited By ~ 1

Author(s):

P. I. Susol ◽

I. D. Nabitovich ◽

V. I. Lakh ◽

Ya. V. Boris

Keyword(s):

Thin Film ◽

Film Resistance ◽

Resistance Thermometers

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Thin-film resistance thermometers on silicon wafers

Measurement Science and Technology ◽

10.1088/0957-0233/20/4/045206 ◽

2009 ◽

Vol 20 (4) ◽

pp. 045206 ◽

Cited By ~ 17

Author(s):

Kenneth G Kreider ◽

Dean C Ripple ◽

William A Kimes

Keyword(s):

Thin Film ◽

Silicon Wafers ◽

Film Resistance ◽

Resistance Thermometers

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Thin-film resistance thermometers for use in aggressive surroundings

Sensors and Actuators A Physical ◽

10.1016/0924-4247(92)80196-a ◽

1992 ◽

Vol 30 (1-2) ◽

pp. 59-62 ◽

Cited By ~ 3

Author(s):

A. Bajtsar ◽

O. Mikolajczuk ◽

Y. Tretyakov

Keyword(s):

Thin Film ◽

Film Resistance ◽

Resistance Thermometers

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The determination of unsteady heat flow to wall from the measurements of surface temperature made with thin film resistance thermometers

International Journal of Heat and Mass Transfer ◽

10.1016/0017-9310(66)90018-4 ◽

1966 ◽

Vol 9 (3) ◽

pp. 199-214 ◽

Cited By ~ 4

Author(s):

Vladimir Kmonlček

Keyword(s):

Thin Film ◽

Heat Flow ◽

Surface Temperature ◽

Film Resistance ◽

Resistance Thermometers

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Measurement of film thickness of thin-film resistance thermometers.

AIAA Journal ◽

10.2514/3.4585 ◽

1968 ◽

Vol 6 (4) ◽

pp. 747-748 ◽

Cited By ~ 2

Author(s):

DAVID J. McCAA

Keyword(s):

Thin Film ◽

Film Thickness ◽

Film Resistance ◽

Resistance Thermometers

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Typical R(T 90) Characteristics of Platinum Thin-Film Resistance Thermometers in the Temperature Range from −50 °C to +660 °C

International Journal of Thermophysics ◽

10.1007/s10765-011-1088-6 ◽

2011 ◽

Vol 32 (11-12) ◽

pp. 2379-2387 ◽

Cited By ~ 2

Author(s):

D. Boguhn ◽

M. Koepke

Keyword(s):

Thin Film ◽

Film Resistance ◽

Temperature Range ◽

Resistance Thermometers ◽

Platinum Thin Film

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The study of inspection on thin film resistance strain gauge contact failure by electrical excitation thermal-wave imaging

IEEE Transactions on Industrial Electronics ◽

10.1109/tie.2021.3088368 ◽

2021 ◽

pp. 1-1

Author(s):

Peng Song ◽

Junyan Liu ◽

Fei Wang ◽

Xiaogang Sun

Keyword(s):

Thin Film ◽

Strain Gauge ◽

Thermal Wave ◽

Resistance Strain ◽

Film Resistance ◽

Electrical Excitation ◽

Resistance Strain Gauge ◽

Wave Imaging ◽

Contact Failure ◽

Thermal Wave Imaging

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A thin-film resistance humidity sensor

Sensors and Actuators ◽

10.1016/0250-6874(83)85038-0 ◽

1983 ◽

Vol 4 ◽

pp. 307-315 ◽

Cited By ~ 47

Author(s):

M. Hijikagawa ◽

S. Miyoshi ◽

T. Sugihara ◽

A. Jinda

Keyword(s):

Thin Film ◽

Humidity Sensor ◽

Film Resistance

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Thin‐film platinum resistance thermometers: Fabrication and use

Journal of Vacuum Science and Technology ◽

10.1116/1.569123 ◽

1977 ◽

Vol 14 (1) ◽

pp. 205-209 ◽

Cited By ~ 9

Author(s):

B. F. T. Bolker ◽

P. H. Sidles

Keyword(s):

Thin Film ◽

Platinum Resistance ◽

Platinum Resistance Thermometers ◽

Resistance Thermometers

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Influence of film resistance on negative differential resistance characteristics in electroformed thin-film devices

International Journal of Electronics ◽

10.1080/00207219508926181 ◽

1995 ◽

Vol 78 (3) ◽

pp. 501-508

Author(s):

G. McHALE ◽

M. I. NEWTON ◽

P. D. HOOPER

Keyword(s):

Thin Film ◽

Negative Differential Resistance ◽

Differential Resistance ◽

Film Resistance ◽

Thin Film Devices

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Thin-film Pt Resistance Thermometers on Si Wafers

ECS Meeting Abstracts ◽

10.1149/ma2007-01/35/1259 ◽

2007 ◽

Keyword(s):

Thin Film ◽

Resistance Thermometers

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