Spectroscopic study of chemical composition of high-frequency glow-discharge in halogen-containing gas mixtures

1985 ◽  
Vol 43 (3) ◽  
pp. 971-975
Author(s):  
O. P. Gushchin ◽  
V. M. Dolgopolov ◽  
L. E. Pereverzev ◽  
D. I. Slovetskii
Keyword(s):  
Chemical Composition ◽  
Glow Discharge ◽  
Spectroscopic Study ◽  
High Frequency ◽  
Gas Mixtures

scholarly journals Studies on the Decomposition of NH3 Gas by High Frequency Glow Discharge.

1956 ◽  
Vol 77 (8) ◽  
pp. 1176-1180
Author(s):  
Momotaro Suzuki ◽  
Shozo Miyazaki ◽  
Saku Takahashi
Keyword(s):  
Glow Discharge ◽  
High Frequency ◽  
Decomposition Of Nh3

scholarly journals Studies on the Decompositions of H2O by High Frequency Glow Discharge. I.

1957 ◽  
Vol 78 (2) ◽  
pp. 219-222
Author(s):  
Shozo Miyazaki ◽  
Saku Takahashi
Keyword(s):  
Glow Discharge ◽  
High Frequency

Methods of Improving Glow-Discharge-Deposited a-Si1−xGex:H

1991 ◽  
Vol 219 ◽  
Author(s):  
Y. S. Tsuo ◽  
Y. Xu ◽  
E. A. Ramsay ◽  
R. S. Crandall ◽  
S. J. Salomon ◽  
...  
Keyword(s):  
Material Processing ◽  
Glow Discharge ◽  
Substrate Temperature ◽  
Gas Mixtures ◽  
Gas Composition ◽  
Processing Methods ◽  
Helium 4 ◽  
Process Gas

ABSTRACTWe have studied methods of improving glow-discharge-deposited a-Si1−x Gex :H alloys deposited using silane and germane gas mixtures. Material processing methods studied include (1) varying the substrate temperature from 170° to 280°C, (2) varying the process gas composition and pressure, (3) dilution of the feed gas by hydrogen, argon, or helium, (4) enhancing etching during deposition by adding small amounts of XeF2 vapor into the process gas, and (5) postdeposition annealing and/or hydrogenation.

High-Frequency Glow Discharge

Nature ◽  
1933 ◽  
Vol 132 (3339) ◽  
pp. 675-676
Author(s):  
A. C. VAN DORSTEN
Keyword(s):  
Glow Discharge ◽  
High Frequency

scholarly journals Green manufacturing of metallic nanoparticles: a facile and universal approach to scaling up

2016 ◽  
Vol 4 (29) ◽  
pp. 11222-11227 ◽  
Author(s):  
Jicheng Feng ◽  
Xiaoai Guo ◽  
Nabil Ramlawi ◽  
Tobias V. Pfeiffer ◽  
Ruben Geutjens ◽  
...  
Keyword(s):  
Chemical Composition ◽  
High Frequency ◽  
Metallic Nanoparticles ◽  
Green Manufacturing ◽  
Building Blocks ◽  
Scaling Up ◽  
Universal Approach

A newly developed high frequency spark provides a green, sustainable and versatile platform for manufacturing diverse sub-10 nm particles with well-defined chemical composition that serve as key building blocks.

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