Phosphorus and boron doping effects on solid phase recrystallization of polycrystalline silicon films amorphized by germanium ion implantation

1996 ◽  
Vol 15 (4) ◽  
pp. 343-344
Author(s):  
M. -Y. Kang ◽  
T. Yamamoto ◽  
T. Matsui ◽  
T. Kuwano
Keyword(s):  
Ion Implantation ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Boron Doping ◽  
Silicon Films ◽  
Phase Recrystallization ◽  
Doping Effects ◽  
Polycrystalline Silicon Films

Phosphine Doping Effects in the Plasma Deposition of Polycrystalline Silicon Films

1992 ◽  
Vol 31 (Part 2, No. 10A) ◽  
pp. L1392-L1395 ◽  
Author(s):  
Hiroaki Kakinuma ◽  
Mikio Mohri ◽  
Taiji Tsuruoka
Keyword(s):  
Polycrystalline Silicon ◽  
Plasma Deposition ◽  
Silicon Films ◽  
Doping Effects ◽  
Polycrystalline Silicon Films

Bubbly Silicon: A New Mechanism for Solid Phase Crystallization of Amorphous Silicon

2009 ◽  
Author(s):  
Curtis Anderson ◽  
Lin Cui ◽  
Uwe Kortshagen
Keyword(s):  
Amorphous Silicon ◽  
Polycrystalline Silicon ◽  
Silicon Nanocrystals ◽  
Solid Phase ◽  
Amorphous Film ◽  
Silicon Films ◽  
Amorphous Films ◽  
Solid Phase Crystallization ◽  
Rapid Formation ◽  
Polycrystalline Silicon Films

This paper describes the rapid formation of polycrystalline silicon films through seeding with silicon nanocrystals. The incorporation of seed crystals into amorphous silicon films helps to eliminate the crystallization incubation time observed in non-seeded amorphous silicon films. Furthermore, the formation of several tens of nanometer in diameter voids is observed when cubic silicon nanocrystals with around 30 nm in size are embedded in the amorphous films. These voids move through the amorphous film with high velocity, pulling behind them a crystallized “tail.” This mechanism leads to rapid formation of polycrystalline films.

Effect of boron doping on the structural properties of polycrystalline silicon films grown at reduced pressures

1994 ◽  
Vol 76 (3) ◽  
pp. 1572-1577 ◽  
Author(s):  
Horng‐Chih Lin ◽  
Hsiao‐Yi Lin ◽  
Chun‐Yen Chang ◽  
Tz‐Gwei Jung ◽  
P. J. Wang ◽  
...  
Keyword(s):  
Structural Properties ◽  
Polycrystalline Silicon ◽  
Boron Doping ◽  
Silicon Films ◽  
Polycrystalline Silicon Films ◽  
Reduced Pressures
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